中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments

文献类型:期刊论文

作者Wang P(王鹏)1; Qiao L(乔丽)1; Xu J(许佼)1; Li WX(李无暇)2; Liu WM(刘维民)1; Wang P(王鹏)
刊名ACS Applied Materials and Interfaces
出版日期2015
卷号7期号:23页码:12943-12950
关键词atomic oxygen exposure MoS2 films erosion mechanism titanium doping multilayer
ISSN号1944-8244
通讯作者王鹏
英文摘要The erosion mechanism of magnetron sputtered MoS2 films exposed to the atomic oxygen environment was studied and compared with the Ti-doped MoS2 and MoS2/Ti multilayer films. The compositional and structural changes were investigated as a function of incident fluence by Rutherford back scattering (RBS) and focused ion beam combining with scanning electron microscopy (FIB&SEM). The RBS results indicate that the sulfur atoms are eroded by the incident atomic oxygen atoms and the removed sulfur amount increases but the erosion rate decreases with increasing of incident fluence. For pure MoS2 films the erosion process turns to saturate at the end of investigated fluence of 4.8 × 1021 O cm–2, and for Ti-doped and MoS2/Ti multilayer films the saturation of sulfur erosion is much earlier around incident fluence of 5.2 × 1019 and 2.6 × 1019 O cm–2, respectively. FIB cross-section results reveal that pores structures present in the as-deposited MoS2 films provide a reaction highway, which allows the incident atomic oxygen to be able to reach and react with the sulfur at bottom. Introducing titanium doping or MoS2/Ti multilayer structures definitely reduce the density of pores and defects in the initial films, consequently, erosion process is suppressed or blocked, and the instinct lubricant properties of MoS2 phases can be well-retained in vacuum sliding conditions.
学科主题材料科学与物理化学
收录类别SCI
资助信息the National Natural Science Foundation of China (Grants 51227804;11475236;91023041);973 projects (2013CB632300) of the ministry of Science and technology of China
语种英语
WOS记录号WOS:000356753500073
源URL[http://210.77.64.217/handle/362003/18316]  
专题兰州化学物理研究所_固体润滑国家重点实验室
通讯作者Wang P(王鹏)
作者单位1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100190, Peoples R China
推荐引用方式
GB/T 7714
Wang P,Qiao L,Xu J,et al. Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments[J]. ACS Applied Materials and Interfaces,2015,7(23):12943-12950.
APA Wang P,Qiao L,Xu J,Li WX,Liu WM,&王鹏.(2015).Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments.ACS Applied Materials and Interfaces,7(23),12943-12950.
MLA Wang P,et al."Erosion Mechanism of MoS2-Based Films Exposed to Atomic Oxygen Environments".ACS Applied Materials and Interfaces 7.23(2015):12943-12950.

入库方式: OAI收割

来源:兰州化学物理研究所

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