Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS2 films
文献类型：期刊论文
| 作者 | Qiao L(乔丽) ; Wang P(王鹏); Chai LQ(柴利强); Zhang XL(张小龙); Liu WM(刘维民); Wang P(王鹏)
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| 刊名 | Journal of Physics D: Applied Physics
 |
| 出版日期 | 2015 |
| 卷号 | 48期号:17页码:175304(1-8) |
| 关键词 | MoS2 films oblique angle deposition surface tribology magnetron sputtering |
| ISSN号 | 0022-3727 |
| 通讯作者 | 王鹏 |
| 英文摘要 | In this study, by adjusting the angle between the incident flux and the normal direction of the substrate's surface, the MoS2 film prepared by magnetron sputtering was used as a model system to study the influence of incident flux angles on the structures and properties of deposited films. The morphological and structural evolutions of MoS2 films deposited at different angles ranging from 0 to 85 degrees were characterized and the corresponding mechanical and tribological properties were evaluated. The results show that a conversion of a continuous film structure to a separate columnar structure with high porosity is found as the incident flux angle increases. Although changing the incident flux angle plays a negligible effect on the crystal preferential orientation of deposited MoS2 films, the mechanical and tribological properties of these films degrade dramatically when the incident flux angle is larger than 60 degrees. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Grant No: 51227804;11475236) |
| 语种 | 英语 |
| WOS记录号 | WOS:000353329800015 |
| 源URL | [http://210.77.64.217/handle/362003/18423]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Wang P(王鹏) |
| 作者单位 | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Qiao L,Wang P,Chai LQ,et al. Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS2 films[J]. Journal of Physics D: Applied Physics,2015,48(17):175304(1-8). |
| APA | Qiao L,Wang P,Chai LQ,Zhang XL,Liu WM,&王鹏.(2015).Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS2 films.Journal of Physics D: Applied Physics,48(17),175304(1-8). |
| MLA | Qiao L,et al."Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS2 films".Journal of Physics D: Applied Physics 48.17(2015):175304(1-8). |
入库方式： OAI收割
来源：兰州化学物理研究所
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