Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures
文献类型：期刊论文
| 作者 | Guo HJ(国洪建)1,2,3 ; Chen WY(陈文远)1,2; Shan Y(陕钰)1; Wang WZ(王文珍)1; Zhang, Zhenyu3; Jia JH(贾均红)1; Jia JH(贾均红)
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| 刊名 | Applied Surface Science
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| 出版日期 | 2015 |
| 卷号 | 357页码:473-478 |
| 关键词 | Titanium nitride film Pulsed laser deposition (PLD) Substrate temperature Microstructure Tribology property |
| ISSN号 | 0169-4332 |
| 通讯作者 | 贾均红 |
| 英文摘要 | The nanostructured titanium nitride (TiN) films were fabricated by pulsed laser deposition (PLD) technique at different substrate temperatures under residual vacuum, and the influence of substrate temperatures on the microstructure, mechanical and tribological properties of TiN films was investigated and discussed. The results shown that the consistent stoichiometric TiN films were obtained and the grain size increased from 10.5 to 38.7 nm with the increasing of substrate temperature. The hardness of films decreased with the substrate temperatures increasing, the highest hardness reached to 30.6 GPa at the substrate temperature of 25 ℃, and the critical load increased first and decreased at 500 ℃, the highest critical load was 23.8 N at the substrate temperature of 300 ℃. The film deposited at the substrate temperature of 25 ℃ registered the lowest friction coefficient of 0.088 and wear rate of 7.8 x 10-7 mm3/(N m). The excellent tribological performance of the films was attributed to the small grain size, high hardness and smooth surface of the film. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China (Grant No. 51175490);National Defense Science and Technology Innovation Foundation of Chinese Academy of Sciences (Grant No. CXJJ-14-M39);the Project of Gansu Province Longyuan Young Creative Talents (Grant No. 2015GS06462) |
| 语种 | 英语 |
| WOS记录号 | WOS:000366216900062 |
| 源URL | [http://210.77.64.217/handle/362003/18687]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 通讯作者 | Jia JH(贾均红) |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China 3.Lanzhou Inst Technol, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Guo HJ,Chen WY,Shan Y,et al. Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures[J]. Applied Surface Science,2015,357:473-478. |
| APA | Guo HJ.,Chen WY.,Shan Y.,Wang WZ.,Zhang, Zhenyu.,...&贾均红.(2015).Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures.Applied Surface Science,357,473-478. |
| MLA | Guo HJ,et al."Microstructures and properties of titanium nitride films prepared by pulsed laser deposition at different substrate temperatures".Applied Surface Science 357(2015):473-478. |
入库方式： OAI收割
来源：兰州化学物理研究所
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