Virtual production lines design for back-end semiconductor manufacturing systems
文献类型：期刊论文
| 作者 | Tang, Y; Zhou, MC; Qiu, RG |
| 刊名 | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
 |
| 出版日期 | 2003-08-01 |
| 卷号 | 16期号:3页码:543-550 |
| 关键词 | heuristic algorithm manufacturing execution system production configuration virtual production line |
| 英文摘要 | This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Engineering ; Physics |
| 关键词[WOS] | FABRICATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000184695600026 |
| 公开日期 | 2015-12-24 |
| 源URL | [http://ir.ia.ac.cn/handle/173211/9929]  |
| 专题 | 自动化研究所_09年以前成果 自动化研究所_精密感知与控制研究中心 |
| 作者单位 | 1.Rowan Univ, Dept Elect & Comp Engn, Glassboro, NJ 08028 USA 2.New Jersey Inst Technol, Dept Elect & Comp Engn, Newark, NJ 07102 USA 3.Chinese Acad Sci, Inst Automat, Beijing 100080, Peoples R China 4.Penn State Univ, Dept Informat Sci, Malvern, PA 19355 USA |
| 推荐引用方式 GB/T 7714 | Tang, Y,Zhou, MC,Qiu, RG. Virtual production lines design for back-end semiconductor manufacturing systems[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,2003,16(3):543-550. |
| APA | Tang, Y,Zhou, MC,&Qiu, RG.(2003).Virtual production lines design for back-end semiconductor manufacturing systems.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING,16(3),543-550. |
| MLA | Tang, Y,et al."Virtual production lines design for back-end semiconductor manufacturing systems".IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 16.3(2003):543-550. |
入库方式： OAI收割
来源：自动化研究所
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