Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation
文献类型：期刊论文
| 作者 | Bai AQ (Bai Anqi) ; Cheng BW (Cheng Buwen) ; Wang XF (Wang Xiaofeng) ; Xue CL (Xue Chunlai) ; Zuo YH (Zuo Yuhua) ; Wang QM (Wang Qiming) |
| 刊名 | journal of nanoscience and nanotechnology
 |
| 出版日期 | 2010 |
| 卷号 | 10期号:11 sp. iss. si页码:7428-7431 |
| 关键词 | ANODIC ALUMINA FILMS NANOWIRE ARRAYS POROUS ALUMINA NANOCRYSTALS |
| 通讯作者 | cheng, bw, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. |
| 合作状况 | 其它 |
| 英文摘要 | a convenient fabrication technology for large-area, highly-ordered nanoelectrode arrays on silicon substrate has been described here, using porous anodic alumina (paa) as a template. the ultrathin paa membranes were anodic oxidized utilizing a two-step anodization method, from al film evaporated on substrate. the purposes for the use of two-step anodization were, first, improving the regularity of the porous structures, and second reducing the thickness of the membranes to 100 similar to 200 nm we desired. then the nanoelectrode arrays were obtained by electroless depositing ni-w alloy into the through pores of paa membranes, making the alloy isolated by the insulating pore walls and contacting with the silicon substrates at the bottoms of pores. the ni-w alloy was also electroless deposited at the back surface of silicon to form back electrode. then ohmic contact properties between silicon and ni-w alloy were investigated after rapid thermal annealing. scanning electron microscopy (sem) observations showed the structure characteristics, and the influence factors of fabrication effect were discussed. the current voltage (i-v) curves revealed the contact properties. after annealing in n-2 at 700 degrees c, good linear property was shown with contact resistance of 33 omega, which confirmed ohmic contacts between silicon and electrodes. these results presented significant application potential of this technology in nanosize current-injection devices in optoelectronics, microelectronics and bio-medical fields.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-11-30t05:41:38z no. of bitstreams: 1 fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation.pdf: 1278844 bytes, checksum: a5ac85c3a4c3a633806ec9aac898529b (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-11-30t05:43:05z (gmt) no. of bitstreams: 1 fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation.pdf: 1278844 bytes, checksum: a5ac85c3a4c3a633806ec9aac898529b (md5); made available in dspace on 2010-11-30t05:43:05z (gmt). no. of bitstreams: 1 fabrication of silicon-based template-assisted nanoelectrode arrays and ohmic contact properties investigation.pdf: 1278844 bytes, checksum: a5ac85c3a4c3a633806ec9aac898529b (md5) previous issue date: 2010; 其它 |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-11-30 ; 2011-04-28 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/20650]  |
| 专题 | 半导体研究所_集成光电子学国家重点实验室 |
| 推荐引用方式 GB/T 7714 | Bai AQ ,Cheng BW ,Wang XF ,et al. Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation[J]. journal of nanoscience and nanotechnology,2010,10(11 sp. iss. si):7428-7431. |
| APA | Bai AQ ,Cheng BW ,Wang XF ,Xue CL ,Zuo YH ,&Wang QM .(2010).Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation.journal of nanoscience and nanotechnology,10(11 sp. iss. si),7428-7431. |
| MLA | Bai AQ ,et al."Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation".journal of nanoscience and nanotechnology 10.11 sp. iss. si(2010):7428-7431. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。