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Investigation on the strain relaxation of InGaN layer and its effects on the InGaN structural and optical properties

文献类型:期刊论文

作者Wang H (Wang H.) ; Jiang DS (Jiang D. S.) ; Jahn U (Jahn U.) ; Zhu JJ (Zhu J. J.) ; Zhao DG (Zhao D. G.) ; Liu ZS (Liu Z. S.) ; Zhang SM (Zhang S. M.) ; Qiu YX (Qiu Y. X.) ; Yang H (Yang H.)
刊名physica b-condensed matter
出版日期2010
卷号405期号:22页码:4668-4672
关键词InGaN Dislocation Metalorganic chemical vapor deposition High resolution X-ray diffraction Cathodoluminescence MISFIT DISLOCATIONS QUANTUM-WELLS BAND-GAP EPILAYERS GENERATION ALLOYS INN
通讯作者wang, h, chinese acad sci, state key lab integrated optoelect, inst semicond, pob 912, beijing 100083, peoples r china. 电子邮箱地址: wangh@semi.ac.cn
合作状况国内
英文摘要the evolution of strain and structural properties of thick epitaxial ingan layers grown on gan with different thicknesses are investigated. it is found that, with increase in ingan thickness, plastic relaxation via misfit dislocation generation becomes a more important strain relaxation mechanism. accompanied with the relaxation of compressive strain, the in composition of ingan layer increases and induces an apparent red-shift of the cathodoluminescence peak of the ingan layer. on the other hand, the plastic relaxation process results in a high defect density, which degrades the structural and optical properties of ingan layers. a transition layer region with both strain and in composition gradients is found to exist in the 450-nm-thick ingan layer.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-12-12t08:06:11z no. of bitstreams: 1 investigation on the strain relaxation of ingan layer and its effects on the ingan structural and optical properties.pdf: 686746 bytes, checksum: 34fb136f615a0efae93c2b53bc18ac31 (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-12-12t08:07:24z (gmt) no. of bitstreams: 1 investigation on the strain relaxation of ingan layer and its effects on the ingan structural and optical properties.pdf: 686746 bytes, checksum: 34fb136f615a0efae93c2b53bc18ac31 (md5); made available in dspace on 2010-12-12t08:07:24z (gmt). no. of bitstreams: 1 investigation on the strain relaxation of ingan layer and its effects on the ingan structural and optical properties.pdf: 686746 bytes, checksum: 34fb136f615a0efae93c2b53bc18ac31 (md5) previous issue date: 2010; this work was supported by the national natural science fund of china (grant nos. 60976045, 60506001, 60836003 and 60776047), national basic research program (2007cb936700) and the national science foundation for distinguished young scholars under grant no. 60925017. the authors would like to thank the beijing synchrotron radiation facility (bsrf) for assistance in thin film characterization.; 国内
学科主题光电子学
收录类别SCI
资助信息this work was supported by the national natural science fund of china (grant nos. 60976045, 60506001, 60836003 and 60776047), national basic research program (2007cb936700) and the national science foundation for distinguished young scholars under grant no. 60925017. the authors would like to thank the beijing synchrotron radiation facility (bsrf) for assistance in thin film characterization.
语种英语
公开日期2010-12-12 ; 2011-04-28
源URL[http://ir.semi.ac.cn/handle/172111/20672]  
专题半导体研究所_集成光电子学国家重点实验室
推荐引用方式
GB/T 7714
Wang H ,Jiang DS ,Jahn U ,et al. Investigation on the strain relaxation of InGaN layer and its effects on the InGaN structural and optical properties[J]. physica b-condensed matter,2010,405(22):4668-4672.
APA Wang H .,Jiang DS .,Jahn U .,Zhu JJ .,Zhao DG .,...&Yang H .(2010).Investigation on the strain relaxation of InGaN layer and its effects on the InGaN structural and optical properties.physica b-condensed matter,405(22),4668-4672.
MLA Wang H ,et al."Investigation on the strain relaxation of InGaN layer and its effects on the InGaN structural and optical properties".physica b-condensed matter 405.22(2010):4668-4672.

入库方式: OAI收割

来源:半导体研究所

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