OXYGEN ANALYSES IN HIGH-TC SUPERCONDUCTING FILMS BY MEV PROTON ELASTIC BACKSCATTERING
文献类型：期刊论文
| 作者 | JIANG WL ; ZHU PR ; YIN SD ; XU TB ; REN MM ; ZHOU JS |
| 刊名 | nuclear instruments & methods in physics research section b-beam interactions with materials and atoms
 |
| 出版日期 | 1993 |
| 卷号 | 83期号:4页码:552-556 |
| ISSN号 | 0168-583x |
| 关键词 | THIN-FILMS |
| 通讯作者 | jiang wl chinese acad sciinst physion beam labpob 60343beijing 100080peoples r china |
| 中文摘要 | a technique for analysis of total oxygen contents in high-t(c) superconducting films is demonstrated. it uses elastic backscattering (ebs) of 1.5-2.5 mev protons. by comparing the h ebs spectra from substrate materials, the absolute oxygen content in the films can be easily calculated. it is estimated that the analysis can be accurate to better than 5% for ybco films with thicknesses from several hundred angstroms to several microns. comparisons with rbs are given and advantages of this technique are shown. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-11-15 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/14027]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | JIANG WL,ZHU PR,YIN SD,et al. OXYGEN ANALYSES IN HIGH-TC SUPERCONDUCTING FILMS BY MEV PROTON ELASTIC BACKSCATTERING[J]. nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,1993,83(4):552-556. |
| APA | JIANG WL,ZHU PR,YIN SD,XU TB,REN MM,&ZHOU JS.(1993).OXYGEN ANALYSES IN HIGH-TC SUPERCONDUCTING FILMS BY MEV PROTON ELASTIC BACKSCATTERING.nuclear instruments & methods in physics research section b-beam interactions with materials and atoms,83(4),552-556. |
| MLA | JIANG WL,et al."OXYGEN ANALYSES IN HIGH-TC SUPERCONDUCTING FILMS BY MEV PROTON ELASTIC BACKSCATTERING".nuclear instruments & methods in physics research section b-beam interactions with materials and atoms 83.4(1993):552-556. |
入库方式： OAI收割
来源：半导体研究所
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