CONSTRUCTION AND APPLICATIONS OF A DUAL MASS-SELECTED LOW-ENERGY ION-BEAM SYSTEM
文献类型：期刊论文
| 作者 | QIN FG ; WANG XM ; LIU ZK ; YAO ZY ; REN ZZ ; LIN LY ; SU SJ ; JIANG WS ; LAU WM |
| 刊名 | review of scientific instruments
 |
| 出版日期 | 1991 |
| 卷号 | 62期号:10页码:2322-2325 |
| 关键词 | THIN-FILM DEPOSITION VAPOR-PHASE GROWTH EPITAXY DIAMOND |
| ISSN号 | 0034-6748 |
| 通讯作者 | qin fg chinese acad sciinst semicondbeijingpeoples r china |
| 中文摘要 | a direct ion beam deposition system designed for heteroepitaxy at a low substrate temperature and for the growth of metastable compounds has been constructed and tested. the system consists of two mass-resolved low-energy ion beams which merge at the target with an incident energy range 50-25 000 ev. each ion beam uses a freeman ion source for ion production and a magnetic sector for mass filtering. while a magnetic quadrupole lens is used in one beam for ion optics, an electrostatic quadrupole lens focuses the other beam. both focusing approaches provide a current density more than 100-mu-a/cm2, although the magnetic quadrupole gives a better performance for ion energies below 200 ev. the typical current of each beam reaches more than 0.3 ma at 100 ev, with a ribbon beam of about 0.3-0.5 x 2 cm2. the target is housed in an ultrahigh vacuum chamber with a base pressure of 1 x 10(-7) pa and a typical pressure of 5 x 10(-6) pa when a noncondensable beam like argon is brought into the chamber. during deposition, the target can be heated to 800-degrees-c and scanned mechanically with an electronic scanning control unit. the dual beam system has been used to grow gan using a ga+ and a n+ beam, and to study the oxygen and hydrogen ion beam bombardment effects during carbon ion beam deposition. the results showed that the simultaneous arrival of two beams at the target is particularly useful in compound formation and in elucidation of growth mechanisms. |
| 学科主题 | 半导体器件 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-11-15 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/14257]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | QIN FG,WANG XM,LIU ZK,et al. CONSTRUCTION AND APPLICATIONS OF A DUAL MASS-SELECTED LOW-ENERGY ION-BEAM SYSTEM[J]. review of scientific instruments,1991,62(10):2322-2325. |
| APA | QIN FG.,WANG XM.,LIU ZK.,YAO ZY.,REN ZZ.,...&LAU WM.(1991).CONSTRUCTION AND APPLICATIONS OF A DUAL MASS-SELECTED LOW-ENERGY ION-BEAM SYSTEM.review of scientific instruments,62(10),2322-2325. |
| MLA | QIN FG,et al."CONSTRUCTION AND APPLICATIONS OF A DUAL MASS-SELECTED LOW-ENERGY ION-BEAM SYSTEM".review of scientific instruments 62.10(1991):2322-2325. |
入库方式： OAI收割
来源：半导体研究所
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