INTERFACIAL FORMATION PROCESS AND REACTIONS BETWEEN AU AND HYDROGENATED AMORPHOUS SI STUDIED BY XPS AND AES
文献类型：期刊论文
| 作者 | ZHONG ZT ; WANG DW ; LIAO XB ; MOU SM ; LI CF ; FAN Y |
| 刊名 | journal of non-crystalline solids
 |
| 出版日期 | 1991 |
| 卷号 | 134期号:0页码:141-146 |
| 关键词 | SILICON FILMS MICROSTRUCTURE GOLD |
| ISSN号 | 0022-3093 |
| 通讯作者 | zhong zt acad sinicainst semicondbeijing 100083peoples r china |
| 中文摘要 | interfacial formation processes and reactions between au and hydrogenated amorphous si have been studied by photoemission spectroscopy and auger electron spectroscopy. a three-dimensional growth of au metal cluster occurs at initial formation of the au/a-si:h interface. when au deposition exceeds a critical time, au and si begin interdiffusing and react to create an au-si alloy region. annealing enhances interdiffusion and a si-rich region exists on the topmost surface of au films on a-si:h. |
| 学科主题 | 半导体物理 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-11-15 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/14263]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | ZHONG ZT,WANG DW,LIAO XB,et al. INTERFACIAL FORMATION PROCESS AND REACTIONS BETWEEN AU AND HYDROGENATED AMORPHOUS SI STUDIED BY XPS AND AES[J]. journal of non-crystalline solids,1991,134(0):141-146. |
| APA | ZHONG ZT,WANG DW,LIAO XB,MOU SM,LI CF,&FAN Y.(1991).INTERFACIAL FORMATION PROCESS AND REACTIONS BETWEEN AU AND HYDROGENATED AMORPHOUS SI STUDIED BY XPS AND AES.journal of non-crystalline solids,134(0),141-146. |
| MLA | ZHONG ZT,et al."INTERFACIAL FORMATION PROCESS AND REACTIONS BETWEEN AU AND HYDROGENATED AMORPHOUS SI STUDIED BY XPS AND AES".journal of non-crystalline solids 134.0(1991):141-146. |
入库方式： OAI收割
来源：半导体研究所
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