Optical and structural properties of anodized AlxGa1-xAs layers
文献类型：期刊论文
| 作者 | Xiang XB ; Liao XB ; Chang SL ; Du WH |
| 刊名 | materials science and engineering b-solid state materials for advanced technology
 |
| 出版日期 | 1997 |
| 卷号 | 44期号:0页码:121-124 |
| 关键词 | anodized AlxGa1-xAs films optical reflectance x-ray photoemission auger electron spectroscopy |
| ISSN号 | 0921-5107 |
| 通讯作者 | xiang xb chinese acad sciinst semicondlab semicond mat scibeijing 100864peoples r china. |
| 中文摘要 | the optical and structural properties of anodized alxga1-xas films were investigated by using optical reflectance, x-ray photoemission and auger electron spectroscopy (xps and aes). ii was found that the anodization process occurs progressively from the surface to the bulk of alxga1-xas and the formed oxidation film comprises mainly oxides of al and ga together with a relatively small amount of as. the refractive indexes of the anodized al0.8ga0.2as film and al0.8ga0.2as film itself were deduced to be about 1.80 and 3.25, respectively, indicating that the anodization film is desirable for anti-reflection coating of the surface of alxga1-xas/gaas solar cells. (c) 1997 elsevier science s.a. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-11-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/15201]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xiang XB,Liao XB,Chang SL,et al. Optical and structural properties of anodized AlxGa1-xAs layers[J]. materials science and engineering b-solid state materials for advanced technology,1997,44(0):121-124. |
| APA | Xiang XB,Liao XB,Chang SL,&Du WH.(1997).Optical and structural properties of anodized AlxGa1-xAs layers.materials science and engineering b-solid state materials for advanced technology,44(0),121-124. |
| MLA | Xiang XB,et al."Optical and structural properties of anodized AlxGa1-xAs layers".materials science and engineering b-solid state materials for advanced technology 44.0(1997):121-124. |
入库方式： OAI收割
来源：半导体研究所
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