Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon
文献类型：期刊论文
| 作者 | Peng Wenbo ; Liu Shiyong
|
| 刊名 | 半导体学报
 |
| 出版日期 | 2009 |
| 卷号 | 30期号:8页码:39-42 |
| 中文摘要 | composites consisting of hydrogenated amorphous silicon (a-si: h, inorganic) and zinc phthalocyanine (znpc, organic) were prepared by vacuum evaporation of znpc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (pecvd). the optical and electrical properties of the composite film have been investigated. the results demonstrate that znpc can endure the temperature and bombardment of the pecvd plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-si: h film. electron mobility-lifetime products μτ of the composite film were increased by nearly one order of magnitude from 6.96 × 10~(-7) to 5.08 × 10~(-6) cm~2/v. combined with photoconductivity spectra of the composites and pure a-si: h, we tentatively elucidate the improvement in photoconductivity of the composite film. |
| 英文摘要 | composites consisting of hydrogenated amorphous silicon (a-si: h, inorganic) and zinc phthalocyanine (znpc, organic) were prepared by vacuum evaporation of znpc and sequential deposition amorphous silicon via plasma enhanced chemical vapor deposition (pecvd). the optical and electrical properties of the composite film have been investigated. the results demonstrate that znpc can endure the temperature and bombardment of the pecvd plasma and photoconductivity of the composite film was improved by 89.9% compared to pure a-si: h film. electron mobility-lifetime products μτ of the composite film were increased by nearly one order of magnitude from 6.96 × 10~(-7) to 5.08 × 10~(-6) cm~2/v. combined with photoconductivity spectra of the composites and pure a-si: h, we tentatively elucidate the improvement in photoconductivity of the composite film.; 于2010-11-23批量导入; zhangdi于2010-11-23 12:59:56导入数据到semi-ir的ir; made available in dspace on 2010-11-23t04:59:56z (gmt). no. of bitstreams: 1 3672.pdf: 275174 bytes, checksum: b23ddbe9e877e7639df3a7ce51129f1b (md5) previous issue date: 2009; the state key development program for basic research of china,the national natural science foundation of china,the national high technology research and development program of china; institute of semiconductors,chinese academy of sciences;institute of chemistry,chinese academy of sciences |
| 学科主题 | 半导体材料 |
| 收录类别 | CSCD |
| 资助信息 | the state key development program for basic research of china,the national natural science foundation of china,the national high technology research and development program of china |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 ; 2011-04-28 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/15727]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Peng Wenbo,Liu Shiyong. Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon[J]. 半导体学报,2009,30(8):39-42. |
| APA | Peng Wenbo,&Liu Shiyong.(2009).Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon.半导体学报,30(8),39-42. |
| MLA | Peng Wenbo,et al."Influence of zinc phthalocyanines on photoelectrical properties of hydrogenated amorphous silicon".半导体学报 30.8(2009):39-42. |
入库方式： OAI收割
来源：半导体研究所
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