360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals
文献类型：期刊论文
| 作者 | Yang Linlin ; Guo Hengqun ; Zeng Youhua ; Wang Qiming |
| 刊名 | semiconductor photonics and technology
 |
| 出版日期 | 2006 |
| 卷号 | 12期号:2页码:90-94 |
| 中文摘要 | si-rich silicon oxide films were deposited by rf magnetron sputtering onto composite si/sio2 targets. after annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. the photoluminescenee（pl） from the silicon oxide films embedded with silicon nanocrystals was observed at room temperature. the strong peak is at 360 nm, its position is independent of the annealing temperature. the origin of the 360-nm pl in the silicon oxide films embedded with silicon nanoerystals was discussed. |
| 英文摘要 | si-rich silicon oxide films were deposited by rf magnetron sputtering onto composite si/sio2 targets. after annealed at different temperature, the silicon oxide films embedded with silicon nanocrystals were obtained. the photoluminescenee（pl） from the silicon oxide films embedded with silicon nanocrystals was observed at room temperature. the strong peak is at 360 nm, its position is independent of the annealing temperature. the origin of the 360-nm pl in the silicon oxide films embedded with silicon nanoerystals was discussed.; 于2010-11-23批量导入; zhangdi于2010-11-23 13:02:24导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:02:24z (gmt). no. of bitstreams: 1 4143.pdf: 337848 bytes, checksum: f70934e0bb9c557af6156aea4467ca62 (md5) previous issue date: 2006; national natural science foundation of china; college of information science and engineering, huaqiao university;institute of semiconductors, cass |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 资助信息 | national natural science foundation of china |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 ; 2011-04-28 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/16445]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Yang Linlin,Guo Hengqun,Zeng Youhua,et al. 360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals[J]. semiconductor photonics and technology,2006,12(2):90-94. |
| APA | Yang Linlin,Guo Hengqun,Zeng Youhua,&Wang Qiming.(2006).360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals.semiconductor photonics and technology,12(2),90-94. |
| MLA | Yang Linlin,et al."360-nm Photoluminescence from Silicon Oxide Films Embedded with Silicon Nanocrystals".semiconductor photonics and technology 12.2(2006):90-94. |
入库方式： OAI收割
来源：半导体研究所
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