Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity
文献类型：期刊论文
| 作者 | Shi, Zhendong1,2; Fang, Liang1; Zhou, Chongxi1 |
| 刊名 | INTERNATIONAL JOURNAL OF NANOTECHNOLOGY
 |
| 出版日期 | 2015 |
| 卷号 | 12期号:10-12页码:829-837 |
| 关键词 | integrated optics devices micro-electro-mechanical-systems filters gratings |
| ISSN号 | 1475-7435 |
| 英文摘要 | This paper presents basic designs and operation concepts of a novel micro-electro-mechanical-systems (MEMS) filter integrating a tunable Fabry-Perot (FP) cavity and a grating. It is based on the filtering effect of the tunable FP cavity and the spatial separation function of the grating for the different wavelengths. The combination of two devices could widen the spectral range of the traditional FP filter without affecting its spectral linewidth. A MEMS filter configuration based on the silicon-glass bonded structure has been designed. The FP cavity length depends on the thickness of the silicon wafer itself to realise the long cavity length. The T-S cantilevers could decrease the micromirror deformation, and reduce the driving voltage appropriately. Calculational results indicate that narrow linewidth and wide spectral range could be obtained simultaneously at the long cavity length. |
| WOS标题词 | Science & Technology ; Technology |
| 类目[WOS] | Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary |
| 研究领域[WOS] | Science & Technology - Other Topics ; Materials Science |
| 关键词[WOS] | INTERFEROMETER ; FABRICATION |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000364812400010 |
| 公开日期 | 2016-02-26 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3760]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shi, Zhendong,Fang, Liang,Zhou, Chongxi. Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity[J]. INTERNATIONAL JOURNAL OF NANOTECHNOLOGY,2015,12(10-12):829-837. |
| APA | Shi, Zhendong,Fang, Liang,&Zhou, Chongxi.(2015).Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity.INTERNATIONAL JOURNAL OF NANOTECHNOLOGY,12(10-12),829-837. |
| MLA | Shi, Zhendong,et al."Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity".INTERNATIONAL JOURNAL OF NANOTECHNOLOGY 12.10-12(2015):829-837. |
入库方式： OAI收割
来源：光电技术研究所
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