Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
文献类型：期刊论文
| 作者 | Zhou, Yi1,2; Zhu, Jiangping3; Deng, Qinyuan1,2; Liu, Junbo1,2; Si, Xinchun1,2; Hu, Song1 |
| 刊名 | IEEE PHOTONICS JOURNAL
 |
| 出版日期 | 2015-12-01 |
| 卷号 | 7期号:6 |
| 关键词 | Moire fringes magnification grating marks phase analysis |
| ISSN号 | 1943-0655 |
| 英文摘要 | The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moire-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moire fringes. By analyzing the finally obtained Moire fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. |
| WOS标题词 | Science & Technology ; Technology ; Physical Sciences |
| 类目[WOS] | Engineering, Electrical & Electronic ; Optics ; Physics, Applied |
| 研究领域[WOS] | Engineering ; Optics ; Physics |
| 关键词[WOS] | TALBOT INTERFEROMETRY ; ALIGNMENT ; GRATINGS ; PROFILOMETRY ; LITHOGRAPHY ; MICROSCOPY ; IMAGES |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000367248500019 |
| 公开日期 | 2016-02-26 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3785]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | 1.Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Microfabricat, Chengdu 610209, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.Sichuan Univ, Sch Comp Sci & Technol, Chengdu 610064, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,et al. Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System[J]. IEEE PHOTONICS JOURNAL,2015,7(6). |
| APA | Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,Liu, Junbo,Si, Xinchun,&Hu, Song.(2015).Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System.IEEE PHOTONICS JOURNAL,7(6). |
| MLA | Zhou, Yi,et al."Moire-Based Interferometry for Magnification Calibration of Bitelecentric Lens System".IEEE PHOTONICS JOURNAL 7.6(2015). |
入库方式： OAI收割
来源：光电技术研究所
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