Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system
文献类型：期刊论文
| 作者 | Wu, Jinfeng1; He NR(何乃如)1 ; Li HX(李红轩)2; Liu XH(刘晓红)2; Ji L(吉利)2; Huang, Xiaopeng1; Chen JM(陈建敏)2
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| 刊名 | Surface and Interface Analysis
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| 出版日期 | 2015 |
| 卷号 | 47期号:2页码:184-191 |
| 关键词 | hybrid PVD coating system TiAlSiN films microstructure mechanical properties and oxidation resistance |
| ISSN号 | 0142-2421 |
| 通讯作者 | Wu, Jinfeng |
| 英文摘要 | TiAlSiN coatings with different Si contents were deposited on silicon and high-temperature alloy by using a hybrid physical vapor deposition coating system, where the cathodic arc ion plating was combined with a twin target mid-frequency magnetron sputtering. The chemical composition, microstructure, cross-sectional structure and morphology were carried out by X-ray photoelectron spectroscope (XPS), X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM) and transmission electron microscope (TEM), respectively. NanoTest 600 nanomechanical system and ball-on-disc friction tester were used to investigate the mechanical and friction properties of TiAlSiN coatings. The worn surface of the TiAlSiN coatings and counterballs were investigated by means of surface profilometer and optical microscope. The wear rates were also measured by surface profilometer. The results showed that the Si addition did not change the coatings growth orientation, and the coating transfered into amorphous phase when the Si content reached about 13.9 at.%. The tribological properties and the hardness were improved by solid solution of Si atoms and grain boundary strengthening of SiNx amorphous phase with moderate Si content addition. In addition, the SiNx amorphous phase improved oxidation resistance of TiAlN coating, but with a high Si content (more than 8.3 at.% in this work) the agglomeration of SiNx amorphous phase would reduce the mechanical properties and oxidation resistance of the coating. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (51065001) |
| 语种 | 英语 |
| WOS记录号 | WOS:000348523000003 |
| 源URL | [http://210.77.64.217/handle/362003/19297]  |
| 专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.Gansu Agr Univ, Sch Engn, Lanzhou 730070, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
| 推荐引用方式 GB/T 7714 | Wu, Jinfeng,He NR,Li HX,et al. Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system[J]. Surface and Interface Analysis,2015,47(2):184-191. |
| APA | Wu, Jinfeng.,He NR.,Li HX.,Liu XH.,Ji L.,...&Chen JM.(2015).Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system.Surface and Interface Analysis,47(2),184-191. |
| MLA | Wu, Jinfeng,et al."Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system".Surface and Interface Analysis 47.2(2015):184-191. |
入库方式： OAI收割
来源：兰州化学物理研究所
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