A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam
文献类型：期刊论文
| 作者 | Han Qin ; Yang Xiaohong
|
| 刊名 | 半导体学报
 |
| 出版日期 | 2005 |
| 卷号 | 26期号:6页码:1087-1093 |
| 中文摘要 | a gaas-based micro-opto-electro-mech anical-systems(moems) tunable resonant cavity enhanced(rce)photodetector with a continuous tuning range of 31nm under a 6v tuning voltage is demonstrated. the single cantilever beam structure is adopted for this moems tunable rce photodetector. the maximum and minimum peak quantum efficiency during the tuning are 36.9 % and 30. 8 %, respectively. the maximum and minimum full-width-at-halfmaximum (fwhm) are 20nm and 14nm,respectively. the dark current density is 7.46a/m2 without bias. |
| 英文摘要 | a gaas-based micro-opto-electro-mech anical-systems(moems) tunable resonant cavity enhanced(rce)photodetector with a continuous tuning range of 31nm under a 6v tuning voltage is demonstrated. the single cantilever beam structure is adopted for this moems tunable rce photodetector. the maximum and minimum peak quantum efficiency during the tuning are 36.9 % and 30. 8 %, respectively. the maximum and minimum full-width-at-halfmaximum (fwhm) are 20nm and 14nm,respectively. the dark current density is 7.46a/m2 without bias.; 于2010-11-23批量导入; zhangdi于2010-11-23 13:04:26导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:04:27z (gmt). no. of bitstreams: 1 4466.pdf: 496476 bytes, checksum: b5d242d91116867e2e07cd54535e8b9d (md5) previous issue date: 2005; 国家重点基础研究发展计划资助项目; optical communication center, school of telecommunication engineering, beijing university of posts and telecommunications;institute of semiconductors,chinese academy of sciences |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 资助信息 | 国家重点基础研究发展计划资助项目 |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 ; 2011-04-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/16975]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Han Qin,Yang Xiaohong. A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam[J]. 半导体学报,2005,26(6):1087-1093. |
| APA | Han Qin,&Yang Xiaohong.(2005).A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam.半导体学报,26(6),1087-1093. |
| MLA | Han Qin,et al."A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam".半导体学报 26.6(2005):1087-1093. |
入库方式： OAI收割
来源：半导体研究所
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