Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement
文献类型:期刊论文
作者 | Zhang C ; Wang XZ |
刊名 | opt. eng.
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出版日期 | 2004 |
卷号 | 43期号:12页码:3008 |
关键词 | angular displacement measurement Fabry-Perot plate sinusoidal phase-modulating interferometry charge-coupled device image sensor |
ISSN号 | 0091-3286 |
中文摘要 | we propose a sinusoidal phase-modulating laser diode interferometer for measuring small angular displacement. the interferometer is based on a fabry-perot plate. it has a simple structure and is insensitive to external disturbance. sinusoidal phase-modulating interferometry is used for improving the measurement accuracy. a charge-coupled device (ccd) image sensor is used for measuring the distance between the reflected beams from two faces of the fabry-perot plate. from the distance, the initial angle of incidence is calculated. compared with michelson interferometers and autocollimators, this interferometer has the advantage of compact size and simple structure. the numerical calculation and experimental results verify the usefulness of this novel interferometer. (c) 2004 society of photo-optical instrumentation engineers. |
语种 | 英语 |
WOS记录号 | WOS:000226071600026 |
公开日期 | 2009-09-18 |
源URL | [http://ir.siom.ac.cn/handle/181231/1622] ![]() |
专题 | 上海光学精密机械研究所_信息光学开放实验室 |
推荐引用方式 GB/T 7714 | Zhang C,Wang XZ. Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement[J]. opt. eng.,2004,43(12):3008, 3013. |
APA | Zhang C,&Wang XZ.(2004).Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement.opt. eng.,43(12),3008. |
MLA | Zhang C,et al."Sinusoidal phase-modulating laser diode interferometer for measuring angular displacement".opt. eng. 43.12(2004):3008. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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