1.55-μm Si-based MOEMS optical tunable filter
文献类型：期刊论文
| 作者 | Zuo Yuhua ; Cheng Buwen
|
| 刊名 | Chinese Optics Letters
 |
| 出版日期 | 2003 |
| 卷号 | 1期号:9页码:528-531 |
| 中文摘要 | A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices. |
| 英文摘要 | A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices.; 于2010-11-23批量导入; zhangdi于2010-11-23 13:06:37导入数据到SEMI-IR的IR; Made available in DSpace on 2010-11-23T05:06:37Z (GMT). No. of bitstreams: 1 4777.pdf: 320296 bytes, checksum: 6f3c7f74b651ea003e606742f8bedf32 (MD5) Previous issue date: 2003; Institute of Semiconductors,Chinese Academy of Sciences |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 ; 2011-04-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/17521]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zuo Yuhua,Cheng Buwen. 1.55-μm Si-based MOEMS optical tunable filter[J]. Chinese Optics Letters,2003,1(9):528-531. |
| APA | Zuo Yuhua,&Cheng Buwen.(2003).1.55-μm Si-based MOEMS optical tunable filter.Chinese Optics Letters,1(9),528-531. |
| MLA | Zuo Yuhua,et al."1.55-μm Si-based MOEMS optical tunable filter".Chinese Optics Letters 1.9(2003):528-531. |
入库方式： OAI收割
来源：半导体研究所
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