Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology
文献类型：期刊论文
| 作者 | Yu Jinzhong ; Wei Hongzhen ; Yan Qinfeng ; Xia Jinsong ; Zhang Xiaofeng |
| 刊名 | 中国科学院研究生院学报
 |
| 出版日期 | 2003 |
| 卷号 | 20期号:1页码:1-6 |
| 中文摘要 | integrated multimode interference (mmi) coupler based on silicon-on-insulator(soi) has been becoming a kind of more and more attractive device in optical systems. sio2thin cladding layers (＜1.0 μm) can be usedin soi waveguide due to the large index step be-tween si and sio2, making them compatible with vlsi technology. the design and fabrica-tion of mmi optical couplers and optical switches in soi technology are presented in thepa-per. we demonstrated the switching time of 2 × 2 mmi-mzi thermo-optical switch is less than 20 μs: |
| 英文摘要 | integrated multimode interference (mmi) coupler based on silicon-on-insulator(soi) has been becoming a kind of more and more attractive device in optical systems. sio2thin cladding layers (＜1.0 μm) can be usedin soi waveguide due to the large index step be-tween si and sio2, making them compatible with vlsi technology. the design and fabrica-tion of mmi optical couplers and optical switches in soi technology are presented in thepa-per. we demonstrated the switching time of 2 × 2 mmi-mzi thermo-optical switch is less than 20 μs:; 于2010-11-23批量导入; zhangdi于2010-11-23 13:06:39导入数据到semi-ir的ir; made available in dspace on 2010-11-23t05:06:39z (gmt). no. of bitstreams: 1 4783.pdf: 389359 bytes, checksum: aaf3965666bdd8044aa67dfafe38148f (md5) previous issue date: 2003; national seience foundation of china,national ministry of science and technology; institute of semiconductors, chinese academy of sciences |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 资助信息 | national seience foundation of china,national ministry of science and technology |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 ; 2011-04-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/17533]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Yu Jinzhong,Wei Hongzhen,Yan Qinfeng,et al. Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology[J]. 中国科学院研究生院学报,2003,20(1):1-6. |
| APA | Yu Jinzhong,Wei Hongzhen,Yan Qinfeng,Xia Jinsong,&Zhang Xiaofeng.(2003).Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology.中国科学院研究生院学报,20(1),1-6. |
| MLA | Yu Jinzhong,et al."Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology".中国科学院研究生院学报 20.1(2003):1-6. |
入库方式： OAI收割
来源：半导体研究所
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