中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Development of XUV multilayer gratings with high resolution and high efficiency

文献类型:会议论文

作者Yang, XW; Huang, QS; Kozhevnikov, IV; Wang, ZS; Zhao, J; Wu, YQ
出版日期2015
会议名称Conference on EUV and X-ray Optics - Synergy between Laboratory and Space IV
会议日期APR 13-14, 2015
会议地点Prague, CZECH REPUBLIC
关键词DIFFRACTION EFFICIENCY ENHANCEMENT WAVELENGTH OPERATION
通讯作者Yang, XW (reprint author), Tongji Univ, Sch Phys Sci & Engn, Inst Precis Opt Engn, MOE Key Lab Adv Micro Struct Mat, Shanghai 200092, Peoples R China.
英文摘要We present a short review of our activities carried out in Tongji University (Shanghai, China) in the field of theory and technology of soft X-ray multilayer diffraction gratings. Diffraction gratings are widely used to study the structure and dynamics of a matter in laboratory and space by spectral analysis techniques. Combining multilayer and grating structures into a single unit allows to increase essentially both the spectral resolution and the efficiency of the diffraction optics. The unified analytical theory of soft X-ray diffraction from multilayer gratings operating in the single-order regime is briefly discussed. The single-order regime occurs when incident wave excites the only diffraction order and it is characterized by ultimately high diffraction efficiency tending to the reflectivity of conventional multilayer mirror. Our first experiments in fabrication of the blazed multilayer gratings by anisotropic etching of a silicon crystal with small roughness of the facet surfaces are described.
收录类别SCI
语种英语
ISSN号0277-786X
ISBN号978-1-62841-631-2
源URL[http://ir.sinap.ac.cn/handle/331007/25101]  
专题上海应用物理研究所_中科院上海应用物理研究所2011-2017年
推荐引用方式
GB/T 7714
Yang, XW,Huang, QS,Kozhevnikov, IV,et al. Development of XUV multilayer gratings with high resolution and high efficiency[C]. 见:Conference on EUV and X-ray Optics - Synergy between Laboratory and Space IV. Prague, CZECH REPUBLIC. APR 13-14, 2015.

入库方式: OAI收割

来源:上海应用物理研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。