1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm
文献类型：期刊论文
| 作者 | Cheng Buwen
|
| 刊名 | 半导体学报
 |
| 出版日期 | 2003 |
| 卷号 | 24期号:11页码:1140-1144 |
| 中文摘要 | Optical filters capable of single control parameter-based wide tuning are implemented and studied. A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90 nm at 50 V tuning voltage. The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band. |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 资助信息 | 国家重点基础研究发展规划（No. G2 366 3）,国家自然科学基金（批准号 |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/17773]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Cheng Buwen. 1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm[J]. 半导体学报,2003,24(11):1140-1144. |
| APA | Cheng Buwen.(2003).1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm.半导体学报,24(11),1140-1144. |
| MLA | Cheng Buwen."1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm".半导体学报 24.11(2003):1140-1144. |
入库方式： OAI收割
来源：半导体研究所
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