1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity
文献类型：期刊论文
| 作者 | Zuo Yuhua ; Cheng Buwen
|
| 刊名 | 半导体学报
 |
| 出版日期 | 2003 |
| 卷号 | 24期号:9页码:911-915 |
| 中文摘要 | A 1.55μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated. The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique. Due to the excellent thermo-optical property of a-Si, the refractive index of the F-P cavity will be changed by heating; the transmittance resonant peak will therefore shift substantially. The measured tuning range is 12nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9nm, and heating efficiency is 0.1K/mW. The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation. Possible improvements to increase the efficiency of heating are suggested. |
| 学科主题 | 光电子学 |
| 收录类别 | CSCD |
| 资助信息 | National natural Science Foundation of China (No. 961 4 3),National high Technology research and Development Program of China (No. 2 2AA312 1 ),Project supported by State Key Development Program for Basic Research of China (No. G2 366 3) |
| 语种 | 英语 |
| 公开日期 | 2010-11-23 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/17801]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zuo Yuhua,Cheng Buwen. 1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity[J]. 半导体学报,2003,24(9):911-915. |
| APA | Zuo Yuhua,&Cheng Buwen.(2003).1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity.半导体学报,24(9),911-915. |
| MLA | Zuo Yuhua,et al."1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity".半导体学报 24.9(2003):911-915. |
入库方式： OAI收割
来源：半导体研究所
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