Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process
文献类型：期刊论文
| ; | |
| 作者 | Zan Zhang; Beiju Huang; Xu Zhang; Zanyun Zhang; Chuantong Cheng; Xurui Mao; Sijie Liu; Hongda Chen |
| 刊名 | ieee photonics technology letters
 ; IEEE Photonics Technology Letters
|
| 出版日期 | 2015 ; 2015 |
| 卷号 | 27期号:14页码:1543-1546 |
| 学科主题 | 光电子学 ; 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 ; 英语 |
| 公开日期 | 2016-03-22 ; 2016-03-22 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/26662]  |
| 专题 | 半导体研究所_光电子研究发展中心 |
| 推荐引用方式 GB/T 7714 | Zan Zhang,Beiju Huang,Xu Zhang,et al. Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process, Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process[J]. ieee photonics technology letters, IEEE Photonics Technology Letters,2015, 2015,27, 27(14):1543-1546, 1543-1546. |
| APA | Zan Zhang.,Beiju Huang.,Xu Zhang.,Zanyun Zhang.,Chuantong Cheng.,...&Hongda Chen.(2015).Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process.ieee photonics technology letters,27(14),1543-1546. |
| MLA | Zan Zhang,et al."Monolithic Integration of Si3N4 Microring Filters with Bulk CMOS IC through post-Backend Process".ieee photonics technology letters 27.14(2015):1543-1546. |
入库方式： OAI收割
来源：半导体研究所
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