Improved surface and electrical properties of passivated GaSb with lessalkaline sulfide solution
文献类型：期刊论文
| 作者 | Dongyan Tao ; Yu Cheng ; Jingming Liu ; Jie Su ; Tong Liu ; Fengyun Yang ; Fenghua Wang ; Kewei Cao ; Zhiyuan Dong ; Youwen Zhao |
| 刊名 | materials science in semiconductor processing
 |
| 出版日期 | 2015 |
| 卷号 | 40页码:685-689 |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2016-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/26860]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Dongyan Tao,Yu Cheng,Jingming Liu,et al. Improved surface and electrical properties of passivated GaSb with lessalkaline sulfide solution[J]. materials science in semiconductor processing,2015,40:685-689. |
| APA | Dongyan Tao.,Yu Cheng.,Jingming Liu.,Jie Su.,Tong Liu.,...&Youwen Zhao.(2015).Improved surface and electrical properties of passivated GaSb with lessalkaline sulfide solution.materials science in semiconductor processing,40,685-689. |
| MLA | Dongyan Tao,et al."Improved surface and electrical properties of passivated GaSb with lessalkaline sulfide solution".materials science in semiconductor processing 40(2015):685-689. |
入库方式： OAI收割
来源：半导体研究所
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