A novel MEMS actuator with large lateral stroke driven by Lorentz force
文献类型：期刊论文
| 作者 | Xingdong Lv ; Weiwei Wei ; Xu Mao ; Jinling Yang ; Fuhua Yang |
| 刊名 | journal of micromechanics and microengineering
 |
| 出版日期 | 2015 |
| 卷号 | 25页码:025009 |
| 学科主题 | 微电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2016-04-08 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/26980]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Xingdong Lv,Weiwei Wei,Xu Mao,et al. A novel MEMS actuator with large lateral stroke driven by Lorentz force[J]. journal of micromechanics and microengineering,2015,25:025009. |
| APA | Xingdong Lv,Weiwei Wei,Xu Mao,Jinling Yang,&Fuhua Yang.(2015).A novel MEMS actuator with large lateral stroke driven by Lorentz force.journal of micromechanics and microengineering,25,025009. |
| MLA | Xingdong Lv,et al."A novel MEMS actuator with large lateral stroke driven by Lorentz force".journal of micromechanics and microengineering 25(2015):025009. |
入库方式： OAI收割
来源：半导体研究所
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