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Fabrication of micro-nano surface texture by CsCl lithography with antireflection and photoelectronic properties for solar cells

文献类型：期刊论文

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作者Liu J(刘静); Liu, J; Ashmkhan, M; Dong, GQ; Wang, B; Yi, FT; 王波;伊福廷
刊名SOLAR ENERGY MATERIALS AND SOLAR CELLS ; SOLAR ENERGY MATERIALS AND SOLAR CELLS
出版日期2013 ; 2013
卷号108页码:93-97
关键词Micro-nano texture Cesium chloride self-assembly Antireflection Photoelectronic property Solar cell Micro-nano texture Cesium chloride self-assembly Antireflection Photoelectronic property Solar cell
ISSN号0927-0248
DOI10.1016/j.solmat.2012.09.016
英文摘要A pyramid and nanopillar micro-nano surface texture of silicon wafer, which has pyramid arrays about 4-8 mu m with different nanopillars of average diameter from 100 to 500 nm and height from 500 nm to 1.5 mu m, is fabricated by Cesium Chloride (CsCl) self-assembly lithography and dry etching for solar cell. This micro-nano surface texture with 100 and 200 nm average diameter has very good antireflection with reflectance below 5% for the wavelength ranging from 400 to 1000 nm and much lower than that of single pyramid or nanopillar arrays with the same average diameter. The reflected distribution of this micro-nano structure illuminated with white parallel light at incidence angle of 45 degrees is tested by a irradiatometer at the reflected angle from 10 to 80 degree and shows a total diffuse and very low reflection at different reflected angles, which benefits from both the advantages of nanopillar and pyramid structure. The solar cell with this micro-nano texture has been finished with thermal diffusion of Phosphorus for P-N junction and printing silver plasma for front electrode poles, and its photovoltaic conversion efficiency is about 7.05% which is higher than that of solar cell only with the planar, single pyramid or nanopillar and made with the same fabricating process. (C) 2012 Elsevier B.V. All rights reserved.; A pyramid and nanopillar micro-nano surface texture of silicon wafer, which has pyramid arrays about 4-8 mu m with different nanopillars of average diameter from 100 to 500 nm and height from 500 nm to 1.5 mu m, is fabricated by Cesium Chloride (CsCl) self-assembly lithography and dry etching for solar cell. This micro-nano surface texture with 100 and 200 nm average diameter has very good antireflection with reflectance below 5% for the wavelength ranging from 400 to 1000 nm and much lower than that of single pyramid or nanopillar arrays with the same average diameter. The reflected distribution of this micro-nano structure illuminated with white parallel light at incidence angle of 45 degrees is tested by a irradiatometer at the reflected angle from 10 to 80 degree and shows a total diffuse and very low reflection at different reflected angles, which benefits from both the advantages of nanopillar and pyramid structure. The solar cell with this micro-nano texture has been finished with thermal diffusion of Phosphorus for P-N junction and printing silver plasma for front electrode poles, and its photovoltaic conversion efficiency is about 7.05% which is higher than that of solar cell only with the planar, single pyramid or nanopillar and made with the same fabricating process. (C) 2012 Elsevier B.V. All rights reserved.
学科主题Energy & Fuels; Materials Science; Physics ; Energy & Fuels; Materials Science; Physics
收录类别SCI
电子版国际标准刊号1879-3398
语种英语
WOS记录号WOS:000313607800015 ; WOS:000313607800015
公开日期2016-05-03
源URL[http://ir.ihep.ac.cn/handle/311005/223836]  
专题高能物理研究所_多学科研究中心
推荐引用方式
GB/T 7714		 Liu J,Liu, J,Ashmkhan, M,et al. Fabrication of micro-nano surface texture by CsCl lithography with antireflection and photoelectronic properties for solar cells, Fabrication of micro-nano surface texture by CsCl lithography with antireflection and photoelectronic properties for solar cells[J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, SOLAR ENERGY MATERIALS AND SOLAR CELLS,2013, 2013,108, 108:93-97, 93-97.
APA 刘静.,Liu, J.,Ashmkhan, M.,Dong, GQ.,Wang, B.,...&王波；伊福廷.(2013).Fabrication of micro-nano surface texture by CsCl lithography with antireflection and photoelectronic properties for solar cells.SOLAR ENERGY MATERIALS AND SOLAR CELLS,108,93-97.
MLA 刘静,et al."Fabrication of micro-nano surface texture by CsCl lithography with antireflection and photoelectronic properties for solar cells".SOLAR ENERGY MATERIALS AND SOLAR CELLS 108(2013):93-97.

入库方式： OAI收割

来源：高能物理研究所

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