Nanopillars by calcium chloride self-assembly and dry etching
文献类型：期刊论文
| ; | |
| 作者 | Liao YX(廖元勋); Liu J(刘静) ; Wang B(王波); 伊福廷;Liao, YX; Liu, J; Wang, B; Yi, FT
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| 刊名 | MATERIALS LETTERS
 ; MATERIALS LETTERS
|
| 出版日期 | 2012 ; 2012 |
| 卷号 | 67期号:1页码:323-326 |
| 关键词 | Thin films Texture Self-assembly Nanopillars Dry etching Thin films Texture Self-assembly Nanopillars Dry etching |
| DOI | 10.1016/j.matlet.2011.08.116 |
| 英文摘要 | Some applications of nanopillars (solar cell, Li ion battery, etc.) require neither long range order nor strict uniformity but more practicality of fabrication methods. Thin film of deliquescent salts may aggregate into nanodots (dry etch mask) by interaction with absorbed water, with enhanced practicalities such as easy mask removing, covering uneven surface, wide tunability and compatibility. However, only cesium chloride succeeded in last decade, based on diffusion. Herein, a new material calcium chloride (CaCl(2)) is reported to self-assemble into nanodots for the first time, based on the reaction of crystalline hydrate. Their diameters could vary at least from 100 nm to 1.5 mu m with coverage ratio above 35% by the control of film thickness and substrate moisture content. The formed dihydrate dots can keep integrity for more than 1 month in general environments, stable enough for practical use. The whole process flow is possibly controlled within 20 min, due to the fast forming and removing of CaCl(2) dots. Besides, the dots have been made on Si and PMMA substrates and transferred into pillars by dry etch, during which enough etch resistance and good coverage over rough surface are revealed. (C) 2011 Elsevier B.V. All rights reserved.; Some applications of nanopillars (solar cell, Li ion battery, etc.) require neither long range order nor strict uniformity but more practicality of fabrication methods. Thin film of deliquescent salts may aggregate into nanodots (dry etch mask) by interaction with absorbed water, with enhanced practicalities such as easy mask removing, covering uneven surface, wide tunability and compatibility. However, only cesium chloride succeeded in last decade, based on diffusion. Herein, a new material calcium chloride (CaCl(2)) is reported to self-assemble into nanodots for the first time, based on the reaction of crystalline hydrate. Their diameters could vary at least from 100 nm to 1.5 mu m with coverage ratio above 35% by the control of film thickness and substrate moisture content. The formed dihydrate dots can keep integrity for more than 1 month in general environments, stable enough for practical use. The whole process flow is possibly controlled within 20 min, due to the fast forming and removing of CaCl(2) dots. Besides, the dots have been made on Si and PMMA substrates and transferred into pillars by dry etch, during which enough etch resistance and good coverage over rough surface are revealed. (C) 2011 Elsevier B.V. All rights reserved. |
| 学科主题 | Materials Science; Physics ; Materials Science; Physics |
| 收录类别 | SCI |
| WOS记录号 | WOS:000298272200092 ; WOS:000298272200092 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/223940]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 推荐引用方式 GB/T 7714 | Liao YX,Liu J,Wang B,et al. Nanopillars by calcium chloride self-assembly and dry etching, Nanopillars by calcium chloride self-assembly and dry etching[J]. MATERIALS LETTERS, MATERIALS LETTERS,2012, 2012,67, 67(1):323-326, 323-326. |
| APA | 廖元勋.,刘静.,王波.,伊福廷；Liao, YX.,Liu, J.,...&Yi, FT.(2012).Nanopillars by calcium chloride self-assembly and dry etching.MATERIALS LETTERS,67(1),323-326. |
| MLA | 廖元勋,et al."Nanopillars by calcium chloride self-assembly and dry etching".MATERIALS LETTERS 67.1(2012):323-326. |
入库方式： OAI收割
来源：高能物理研究所
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