Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array
文献类型：期刊论文
| 作者 | Wang, WC; Tian, YT; Li, K; Lu, EY; Gong, DS; Li, XJ;卢二阳 |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2013 |
| 卷号 | 273页码:372-376 |
| 关键词 | Silicon nanoporous pillar array (Si-NPA) Zn2SiO4/Si-NPA Chemical vapor deposition Capacitive humidity sensor |
| 英文摘要 | A Zn2SiO4 thin film was grown on silicon nanoporous pillar array (Si-NPA) via a chemical vapor deposition method, and the capacitive humidity-sensing properties of Zn2SiO4/Si-NPA were investigated at room temperature. With the relative humidity (RH) changing from 11% to 95%, the capacitance of the sensor increased from 1.67 to 135.97 nF at the testing frequency of 20 Hz, and an overall increment of 8042% was obtained. The response and recovery time was measured to be 48 and 32 s, respectively. The sensor showed a maximum humidity hysteresis of 1.99% at 75% RH. These results indicated that Zn2SiO4/Si-NPA might be a promising material for fabricating high-performance capacitive humidity sensors. (C) 2013 Elsevier B.V. All rights reserved. |
| 学科主题 | Chemistry; Materials Science; Physics |
| 收录类别 | SCI |
| WOS记录号 | WOS:000317581700056 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/223959]  |
| 专题 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Wang, WC,Tian, YT,Li, K,et al. Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array[J]. APPLIED SURFACE SCIENCE,2013,273:372-376. |
| APA | Wang, WC,Tian, YT,Li, K,Lu, EY,Gong, DS,&Li, XJ；卢二阳.(2013).Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array.APPLIED SURFACE SCIENCE,273,372-376. |
| MLA | Wang, WC,et al."Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array".APPLIED SURFACE SCIENCE 273(2013):372-376. |
入库方式： OAI收割
来源：高能物理研究所
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