Grazing exit X-ray fluorescence spectroscopy
文献类型：期刊论文
| 作者 | Xu Q(徐清) ; Wei XJ(魏向军); Huang YY(黄宇营); He W(何伟); Xu, Q; Wei, XJ; Huang, YY; He, W
|
| 刊名 | HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
 |
| 出版日期 | 2005 |
| 卷号 | 29页码:#REF! |
| 关键词 | grazing exit X-ray fluorescence spectroscopy instrument development thin film |
| 其他题名 | 掠出射X射线荧光分析方法 |
| 通讯作者 | Xu, Q (reprint author), Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China. |
| 英文摘要 | In this paper, A grazing exit X-ray fluorescence spectroscopy for thin film analysis was developed by Institute of High Energy Physics, Chinese Academy of Sciences. GEXRF is a new method of instrumental analysis that not only allows determination of the film composition, but also provides information on depth distributions and densities, thickness of films. With grazing-emission X-ray fluorescence, the opposite principle of total reflection X-ray fluorescence is utilized. In this study, X-ray fluorescence (XRF) experiments have been performed for metal thin films (Ni, Ni/Ti) on silicon substrates and a mirror-polished GaAs under the grazing exit condition. The XRF intensity was measured as a function of the exit angle for nearly normal X-ray incidence. The angular dependence of the grazing exit XRF intensity showed a sharp increase at the critical angle of K-alpha, K-beta radiation for the metal film. The applicability of the grazing exit XRF for thin-film analysis was clearly demonstrated. |
| 学科主题 | Physics |
| 类目[WOS] | Physics, Nuclear ; Physics, Particles & Fields |
| 收录类别 | SCI |
| WOS记录号 | WOS:000234206900021 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/226006]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 推荐引用方式 GB/T 7714 | Xu Q,Wei XJ,Huang YY,et al. Grazing exit X-ray fluorescence spectroscopy[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2005,29:#REF!. |
| APA | 徐清.,魏向军.,黄宇营.,何伟.,Xu, Q.,...&He, W.(2005).Grazing exit X-ray fluorescence spectroscopy.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,29,#REF!. |
| MLA | 徐清,et al."Grazing exit X-ray fluorescence spectroscopy".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 29(2005):#REF!. |
入库方式： OAI收割
来源：高能物理研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。