Sidewall smoothing of micro-pore optics by ion beam etching
文献类型：期刊论文
| 作者 | Zhang TC(张天冲) ; Yi FT(伊福廷); Wang B(王波); Liu J(刘静); Zhang XS(张新帅); Sun GJ(孙钢杰); Zhang, TC; Yi, FT; Wang, B; Liu, J
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| 刊名 | SURFACE & COATINGS TECHNOLOGY
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| 出版日期 | 2015 |
| 卷号 | 278页码:127-131 |
| 关键词 | Sidewall Smooth Polish Micro-pore optics Ion beam |
| 通讯作者 | 张天冲 |
| 英文摘要 | Ion beam was employed to smooth the sidewall surfaces of square pores with high aspect ratio in micro-pore optics (MPO) fabricated using LIGA technique. A small plate tilt angle of 20 was chosen during the smoothing process considering the high aspect ratio of the pores. The evolution of the spatial relation between the incident ion beam and the target surface with sample rotating was investigated. The R-q roughness values decreased from 7.1 to 3.6 nm after 240-minute smoothing by ion beam (E-ion = 400 eV, Flux(ion) = 0.2 mA/cm(2)) and the surface morphology evolution with smoothing time was studied. The smoothing occurred with a grazing angle even less than 2, indicating that ion beam may be a promising technique to smooth sidewalls of micro-pores with high aspect ratio. (C) 2015 Elsevier B.V. All rights reserved. |
| 学科主题 | Materials Science; Physics |
| 类目[WOS] | Materials Science, Coatings & Films ; Physics, Applied |
| 收录类别 | SCI ; EI ; CA |
| WOS记录号 | WOS:000361934800018 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/228760]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 推荐引用方式 GB/T 7714 | Zhang TC,Yi FT,Wang B,et al. Sidewall smoothing of micro-pore optics by ion beam etching[J]. SURFACE & COATINGS TECHNOLOGY,2015,278:127-131. |
| APA | 张天冲.,伊福廷.,王波.,刘静.,张新帅.,...&Sun, GJ.(2015).Sidewall smoothing of micro-pore optics by ion beam etching.SURFACE & COATINGS TECHNOLOGY,278,127-131. |
| MLA | 张天冲,et al."Sidewall smoothing of micro-pore optics by ion beam etching".SURFACE & COATINGS TECHNOLOGY 278(2015):127-131. |
入库方式： OAI收割
来源：高能物理研究所
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