Talbot-SNOM method for non-contact evaluation of high-density gratings
文献类型：期刊论文
| 作者 | Luo HX(罗红心) ; Zhou CH(周常河) ; Zou H(邹华) ; Lu YQ(陆云清) |
| 刊名 | opt. commun.
 |
| 出版日期 | 2005 |
| 卷号 | 248期号:1-3页码:97 |
| 关键词 | nanotechnology Talbot effect high-density grating measurement |
| ISSN号 | 0030-4018 |
| 中文摘要 | a talbot scanning near-field optical microscopy (snom) method for non-contact evaluating of high-density gratings was described. this method combines the talbot self-imaging effect of the gratings and the conventional snom technique without damage. the significant advantages of this method are its simple structure, reliable and fast measurement for the surface quality of the tested gratings. experimental results of three different kinds of gratings were demonstrated to indicate that this method is effective for evaluation surface quality of high-density gratings. (c) 2004 elsevier b.v. all rights reserved. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000228443200011 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/1734]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Luo HX,Zhou CH,Zou H,et al. Talbot-SNOM method for non-contact evaluation of high-density gratings[J]. opt. commun.,2005,248(1-3):97, 103. |
| APA | 罗红心,周常河,邹华,&陆云清.(2005).Talbot-SNOM method for non-contact evaluation of high-density gratings.opt. commun.,248(1-3),97. |
| MLA | 罗红心,et al."Talbot-SNOM method for non-contact evaluation of high-density gratings".opt. commun. 248.1-3(2005):97. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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