Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.
文献类型：期刊论文
| 作者 | Liu J(刘静) ; Zhang XS(张新帅); Sun GJ(孙钢杰); Wang YT(王雨婷); Wang B(王波); Zhang TC(张天冲); Yi FT(伊福廷); 刘鹏(多); Liu; Jing
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| 刊名 | Materials Science in Semiconductor Processing
 |
| 出版日期 | 2015 |
| 卷号 | 40页码:44-49 |
| 关键词 | Fabrication CsCl self-assembly Inverted pyramid Silicon solar cell |
| 通讯作者 | 伊福廷 |
| 英文摘要 | Inverted pyramids were fabricated through a method combining cesium chloride (CsCl) self-assembly technology and anisotropy corrosion of silicon solar cells. Ti film with nanoporous masks was formed by lift-off the CsCl nanoislands for the inverted pyramids. The pyramids were then formed by anisotropy corrosion of alkaline solution. The average diameter and morphology of the pyramids were controlled by varying the average diameter of CsCl nanoislands from 400 nm to 1.5 mu m and by varying the etching time of alkaline solution from 2 to 8 min. The inverted-pyramid texture could suppress reflection to below 10% at wavelengths from 400 to 1000 nm, which was much lower than that of planar wafer. A solar cell fabricated from the pyramids had higher short-circuit current density (J(sc)) and photovoltaic conversion efficiency (PCE) compared with those of planar solar cells for the good antireflection property. The solar cell showed a PCE of 15.25%, a J(sc) of 38.35 mA/cm(2), and an open-circuit voltage of 555.7 mV. (C) 2015 Elsevier Ltd. All rights reserved. |
| 学科主题 | Engineering; Materials Science; Physics |
| 类目[WOS] | Engineering, Electrical & Electronic ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter |
| 收录类别 | SCI ; EI ; CA |
| WOS记录号 | WOS:000363344600006 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/228871]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 推荐引用方式 GB/T 7714 | Liu J,Zhang XS,Sun GJ,et al. Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.[J]. Materials Science in Semiconductor Processing,2015,40:44-49. |
| APA | 刘静.,张新帅.,孙钢杰.,王雨婷.,王波.,...&Peng..(2015).Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell..Materials Science in Semiconductor Processing,40,44-49. |
| MLA | 刘静,et al."Fabrication of inverted pyramid structure by Cesium Chloride self-assembly lithography for silicon solar cell.".Materials Science in Semiconductor Processing 40(2015):44-49. |
入库方式： OAI收割
来源：高能物理研究所
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