中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
X-ray nonspecular scattering from amorphous Mo films

文献类型:期刊论文

作者Ma HJ(马宏骥); Jiang XM(姜晓明); Cui MQ(崔明启); Xian DC(冼鼎昌); Ma, HJ; Jiang, XM; Cui, MQ; Xian, DC
刊名CHINESE PHYSICS LETTERS
出版日期1997
卷号14期号:3页码:#REF!
通讯作者Ma, HJ (reprint author), CHINESE ACAD SCI,INST HIGH ENERGY PHYS,BEIJING 100039,PEOPLES R CHINA.
英文摘要X-ray nonspecular scattering method is used to study the structures of Mo thin films fabricated with magnetron sputtering under different Ar pressures, The results show that with the increase of Ar pressure, the density of amorphous Mo film decreased; the surface roughness of the films increased, while the surface coherent length decreased. The abnormal glow discharging in the sputtering processes interprets the observed results well.
学科主题Physics
类目[WOS]Physics, Multidisciplinary
收录类别SCI
WOS记录号WOS:A1997XA76400009
公开日期2016-05-03
源URL[http://ir.ihep.ac.cn/handle/311005/226812]  
专题高能物理研究所_院士
推荐引用方式
GB/T 7714
Ma HJ,Jiang XM,Cui MQ,et al. X-ray nonspecular scattering from amorphous Mo films[J]. CHINESE PHYSICS LETTERS,1997,14(3):#REF!.
APA 马宏骥.,姜晓明.,崔明启.,冼鼎昌.,Ma, HJ.,...&Xian, DC.(1997).X-ray nonspecular scattering from amorphous Mo films.CHINESE PHYSICS LETTERS,14(3),#REF!.
MLA 马宏骥,et al."X-ray nonspecular scattering from amorphous Mo films".CHINESE PHYSICS LETTERS 14.3(1997):#REF!.

入库方式: OAI收割

来源:高能物理研究所

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