Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing
文献类型:期刊论文
作者 | Chunping Jiang(蒋春萍)![]() |
刊名 | Applied Surface Science
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出版日期 | 2012 |
期号 | 20 |
关键词 | nanocrystal-silicon nanopillar array reflectivity photoluminescence |
通讯作者 | Bo Qian(钱波) |
英文摘要 | The optical properties of nanocrystal-silicon (nc-Si) thin films on silicon nanopillar arrays after thermal annealing treatments have been investigated in this paper. The structure was prepared by SiO2 nanosphere lithography, reactive-ion etching, conformal deposition method and thermal annealing treatment, successively. The thickness of nc-Si thin film is about 100 nm, while the diameter, period and height of silicon nanopillar arrays are about 250 nm, 500 nm and 1 μm, respectively. By reflectivity and photoluminescence (PL) spectroscopy measurements in visible to near-infrared wavelength range, the minimum reflectivity of about 0.7% has been demonstrated in such kind of structure, meanwhile, a large variation (from 12.5 times of suppression to 8.8 times of enhancement compared to the flat referential thin films) of the light emission efficiencies of the samples depending on the thermal annealing temperatures has been observed, which is due to the temperature dependent modification of optical constants of nc-Si thin films. |
语种 | 英语 |
WOS记录号 | WOS:000312958500050 |
公开日期 | 2013-01-16 |
源URL | [http://58.210.77.100/handle/332007/901] ![]() |
专题 | 苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_蒋春萍团队 |
推荐引用方式 GB/T 7714 | Chunping Jiang. Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing[J]. Applied Surface Science,2012(20). |
APA | Chunping Jiang.(2012).Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing.Applied Surface Science(20). |
MLA | Chunping Jiang."Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing".Applied Surface Science .20(2012). |
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