中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing

文献类型:期刊论文

作者Chunping Jiang(蒋春萍)
刊名Applied Surface Science
出版日期2012
期号20
关键词nanocrystal-silicon nanopillar array reflectivity photoluminescence
通讯作者Bo Qian(钱波)
英文摘要The optical properties of nanocrystal-silicon (nc-Si) thin films on silicon nanopillar arrays after thermal annealing treatments have been investigated in this paper. The structure was prepared by SiO2 nanosphere lithography, reactive-ion etching, conformal deposition method and thermal annealing treatment, successively.
The thickness of nc-Si thin film is about 100 nm, while the diameter, period and height of silicon nanopillar arrays are about 250 nm, 500 nm and 1 μm, respectively. By reflectivity and photoluminescence (PL) spectroscopy measurements in visible to
near-infrared wavelength range, the minimum reflectivity of about 0.7% has been demonstrated in such kind of structure, meanwhile, a large variation (from 12.5 times of suppression to 8.8 times of enhancement compared to the flat referential thin films) of the light emission efficiencies of the samples depending on the thermal annealing temperatures has been observed, which is due to the temperature dependent modification of optical constants of nc-Si thin films.
语种英语
WOS记录号WOS:000312958500050
公开日期2013-01-16
源URL[http://58.210.77.100/handle/332007/901]  
专题苏州纳米技术与纳米仿生研究所_纳米器件及相关材料研究部_蒋春萍团队
推荐引用方式
GB/T 7714
Chunping Jiang. Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing[J]. Applied Surface Science,2012(20).
APA Chunping Jiang.(2012).Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing.Applied Surface Science(20).
MLA Chunping Jiang."Optical properties of nanocrystal-silicon thin films on silicon nanopillar arrays after thermal annealing".Applied Surface Science .20(2012).

入库方式: OAI收割

来源:苏州纳米技术与纳米仿生研究所

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