Solid electrolyte interphase (SEI) is an in situ formed thin coating on lithium ion battery (LIB) electrodes. The mechanical property of SEI largely defines the cycling performance and the safety of LIBs but has been rarely investigated. Here, we report quantitatively the Young’s modulus of SEI films on MnO anodes. The inhomogeneity of SEI film in morphology, structure, and mechanical properties provides new insights to the evolution of SEI on electrodes. Furthermore, the quantitative methodology established in this study opens a new approach to direct investigation of SEI properties in various electrode materials systems.