中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals

文献类型:期刊论文

作者Quan, W. L.1; Sun, X. W.1; Song, Q.1; Fu, Z. J.2; Guo, P.1; Tian, J. H.1; Chen JM(陈建敏)3
刊名Applied Surface Science
出版日期2012
卷号263页码:339-344
关键词Hydrogenated carbon film CH radical Molecular dynamics simulation Growth mechanism
ISSN号0169-4332
通讯作者Quan, W. L.
英文摘要The growth of hydrogenated carbon film from CH radicals is studied by classical molecular dynamics simulation for various incident energies (3.25–130 eV). The impingement of CH radical and its effect on the microstructure of formed film are carefully analyzed. It is found that the sp3-C fraction is almost identical to the H concentration for all films; both of them decrease with increasing incident energy. To deposit hydrogenated carbon film with fine smoothness, the energy of incident CH should be 10–70 eV. At other energies (either lower or higher), deposited films are of roughness and with some chain-like structures at surface. Different growth mechanisms behind these observations are discussed.
学科主题材料科学与物理化学
收录类别SCI
资助信息the National Natural Science Foundation of China (Grant No. 10674120);the Young Scholars Science Foundation of Lanzhou Jiaotong University (Grant No. 2011027)
语种英语
WOS记录号WOS:000311217500055
公开日期2016-05-03
源URL[http://210.77.64.217/handle/362003/19442]  
专题兰州化学物理研究所_先进润滑与防护材料研究发展中心
兰州化学物理研究所_固体润滑国家重点实验室
作者单位1.Lanzhou Jiaotong Univ, Sch Math Phys & Software Engn, Lanzhou 730070, Peoples R China
2.Chongqing Univ Arts & Sci, Sch Elect & Elect Engn, Chongqing 402160, Peoples R China
3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
推荐引用方式
GB/T 7714
Quan, W. L.,Sun, X. W.,Song, Q.,et al. Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals[J]. Applied Surface Science,2012,263:339-344.
APA Quan, W. L..,Sun, X. W..,Song, Q..,Fu, Z. J..,Guo, P..,...&Chen JM.(2012).Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals.Applied Surface Science,263,339-344.
MLA Quan, W. L.,et al."Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals".Applied Surface Science 263(2012):339-344.

入库方式: OAI收割

来源:兰州化学物理研究所

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