Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals
文献类型:期刊论文
作者 | Quan, W. L.1; Sun, X. W.1; Song, Q.1; Fu, Z. J.2; Guo, P.1; Tian, J. H.1; Chen JM(陈建敏)3![]() |
刊名 | Applied Surface Science
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出版日期 | 2012 |
卷号 | 263页码:339-344 |
关键词 | Hydrogenated carbon film CH radical Molecular dynamics simulation Growth mechanism |
ISSN号 | 0169-4332 |
通讯作者 | Quan, W. L. |
英文摘要 | The growth of hydrogenated carbon film from CH radicals is studied by classical molecular dynamics simulation for various incident energies (3.25–130 eV). The impingement of CH radical and its effect on the microstructure of formed film are carefully analyzed. It is found that the sp3-C fraction is almost identical to the H concentration for all films; both of them decrease with increasing incident energy. To deposit hydrogenated carbon film with fine smoothness, the energy of incident CH should be 10–70 eV. At other energies (either lower or higher), deposited films are of roughness and with some chain-like structures at surface. Different growth mechanisms behind these observations are discussed. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National Natural Science Foundation of China (Grant No. 10674120);the Young Scholars Science Foundation of Lanzhou Jiaotong University (Grant No. 2011027) |
语种 | 英语 |
WOS记录号 | WOS:000311217500055 |
公开日期 | 2016-05-03 |
源URL | [http://210.77.64.217/handle/362003/19442] ![]() |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
作者单位 | 1.Lanzhou Jiaotong Univ, Sch Math Phys & Software Engn, Lanzhou 730070, Peoples R China 2.Chongqing Univ Arts & Sci, Sch Elect & Elect Engn, Chongqing 402160, Peoples R China 3.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
推荐引用方式 GB/T 7714 | Quan, W. L.,Sun, X. W.,Song, Q.,et al. Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals[J]. Applied Surface Science,2012,263:339-344. |
APA | Quan, W. L..,Sun, X. W..,Song, Q..,Fu, Z. J..,Guo, P..,...&Chen JM.(2012).Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals.Applied Surface Science,263,339-344. |
MLA | Quan, W. L.,et al."Molecular dynamics simulation of hydrogenated carbon film growth from CH radicals".Applied Surface Science 263(2012):339-344. |
入库方式: OAI收割
来源:兰州化学物理研究所
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