中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Controllable preparation of fluorine-containing fullerene-like carbon film

文献类型:期刊论文

作者Wang J(汪佳)1,2; Liang AM(梁爱民)1; Wang FG(王富国)1; Xu LH(徐龙华)3; Zhang JY(张俊彦)1; Wang FG(王富国); Zhang JY(张俊彦)
刊名Applied Surface Science
出版日期2016
卷号370页码:291-296
关键词F-FLC film Bias voltage Microstructure Mechanical properties Tribological properties
ISSN号0169-4332
通讯作者王富国 ; 张俊彦
英文摘要

Fluorine-containing fullerene-like carbon (F-FLC) films were prepared by high frequency unipolar pulse plasma-enhanced chemical vapor deposition. The microstructures, mechanical properties as well as the tribological properties of the films were investigated. The results indicate that fullerene-like microstructures appear in amorphous carbon matrix and increase greatly with the increase of bias voltage from −600 to −1600 V. And the fluorine contents in F-FLC films also show a minor rise. In addition, the hardness enhances with the bias voltage and the outstanding elastic recovery maintains because of the formation of fullerene-like microstructures in the F-FLC films. Undoubtedly, the F-FLC film deposited under high bias voltage owns a superiorly low friction, which combines the merits of fluorinated carbon film and fullerene-like carbon film. Moreover, the film also shows a remarkable wear resistance, which is mainly attributed to the excellent mechanical properties. This study provides new insights for us to prepare fluorine-containing FLC films with good mechanical and tribological properties.

学科主题材料科学与物理化学
收录类别SCI
资助信息the Major State Basic Research Development Program of China (973 Program) (No. 2013CB632304)
语种英语
WOS记录号WOS:000374075000037
源URL[http://210.77.64.217/handle/362003/19460]  
专题兰州化学物理研究所_先进润滑与防护材料研究发展中心
兰州化学物理研究所_固体润滑国家重点实验室
通讯作者Wang FG(王富国); Zhang JY(张俊彦)
作者单位1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China
3.Lanzhou Univ, Sch Stomatol, Lanzhou 730000, Peoples R China
推荐引用方式
GB/T 7714
Wang J,Liang AM,Wang FG,et al. Controllable preparation of fluorine-containing fullerene-like carbon film[J]. Applied Surface Science,2016,370:291-296.
APA Wang J.,Liang AM.,Wang FG.,Xu LH.,Zhang JY.,...&张俊彦.(2016).Controllable preparation of fluorine-containing fullerene-like carbon film.Applied Surface Science,370,291-296.
MLA Wang J,et al."Controllable preparation of fluorine-containing fullerene-like carbon film".Applied Surface Science 370(2016):291-296.

入库方式: OAI收割

来源:兰州化学物理研究所

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