Microstructure and mechanical properties of graphitic a-C:H:Si films
文献类型：期刊论文
| 作者 | Zhao F(赵飞)1,2; Li HX(李红轩)1 ; Ji L(吉利)1; Wang YJ(王永军)1; Mo YF(莫宇飞)3; Quan WL(权伟龙)1; Kong QH(孔庆花)1; Wang YX(王永霞)1; Chen JM(陈建敏)1; Zhou HD(周惠娣)1
|
| 刊名 | Surface and Coatings Technology
 |
| 出版日期 | 2012 |
| 卷号 | 206期号:16页码:3467-3471 |
| 关键词 | Graphitic Carbon film Si-doped XPS Raman |
| ISSN号 | 0257-8972 |
| 通讯作者 | 陈建敏 |
| 英文摘要 | A series of graphitic a-C:H:Si films with different Si content were prepared by altering the sputtering current in a hybrid RF-PECVD and magnetron sputtering system. Microstructures and mechanical properties of them were characterized by IR, Raman, XPS, nanoindentation and scratch tests. Results show that although the sp3/sp2 ratio increases with increasing Si content and as high as 8.2 at.% of silicon was doped, the a-C:H:Si films remain graphitic in nature and the ID/IG ratio is nearly constant for all. The coupling effects of sputtering-induced heating and strong ion bombarding due to negatively biasing were considered to be responsible for the film graphitization. The graphitic nature also accounts for the lower nanohardness of prepared a-C:H:Si films than the diamond-like a-C:H and a-C:H:Si films. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the National Natural Science Foundation of China (Grant No.50705093;No.50575217);the Innovative Group Foundation from NSFC (Grant No.50421502);the National 973 Project (No.2007 CB607601) |
| 语种 | 英语 |
| WOS记录号 | WOS:000303231500008 |
| 公开日期 | 2016-05-03 |
| 源URL | [http://210.77.64.217/handle/362003/19541]  |
| 专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 2.Henan Univ Sci & Technol, Sch Mat Sci & Engn, Luoyang, Peoples R China 3.Guangxi Univ, Sch Chem & Chem Engn, Nanning 530004, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao F,Li HX,Ji L,et al. Microstructure and mechanical properties of graphitic a-C:H:Si films[J]. Surface and Coatings Technology,2012,206(16):3467-3471. |
| APA | Zhao F.,Li HX.,Ji L.,Wang YJ.,Mo YF.,...&Zhou HD.(2012).Microstructure and mechanical properties of graphitic a-C:H:Si films.Surface and Coatings Technology,206(16),3467-3471. |
| MLA | Zhao F,et al."Microstructure and mechanical properties of graphitic a-C:H:Si films".Surface and Coatings Technology 206.16(2012):3467-3471. |
入库方式： OAI收割
来源：兰州化学物理研究所
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