Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating
文献类型：期刊论文
| 作者 | Lang, W. C. ; Gao, B. ; Du, H. ; Xiao, J. Q. ; Li, M. X. ; Wang, X. H. |
| 刊名 | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
 |
| 出版日期 | 2015 |
| 卷号 | 15期号:9页码:7357-7362 |
| 关键词 | Arc Ion Plating Transverse Magnetic Field (TMF) Pulsed Bias Nitrogen Partial Pressure Substrate Position Macro-Particles Reduction |
| ISSN号 | 1533-4880 |
| 收录类别 | SCI |
| 资助信息 | Natural Science Foundation of Zhejiang Province [LQ12E01003]; National Natural Science Foundation of China [51171197] |
| 语种 | 英语 |
| 公开日期 | 2016-04-21 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/74932]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Lang, W. C.,Gao, B.,Du, H.,et al. Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2015,15(9):7357-7362. |
| APA | Lang, W. C.,Gao, B.,Du, H.,Xiao, J. Q.,Li, M. X.,&Wang, X. H..(2015).Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,15(9),7357-7362. |
| MLA | Lang, W. C.,et al."Investigation on Behavior of Macro-Particles in TiN Film by Arc Ion Plating".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 15.9(2015):7357-7362. |
入库方式： OAI收割
来源：金属研究所
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