Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts
文献类型：期刊论文
| 作者 | Ren, Wenfeng1,2; Wang, Yanhong1; Zhang, Zailei1; Tan, Qiangqiang1; Zhong, Ziyi3; Su, Fabing1 |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2016 |
| 卷号 | 360期号:JAN页码:192-197 |
| 关键词 | Si wafers Direct-pattern Rochow reaction Copper catalysts CH3Cl |
| ISSN号 | 0169-4332 |
| 英文摘要 | Despite the promising application of patterned Si wafers (PSWs) in electrochemistry and photochemistry, the simple and environment-friendly fabrication of these PSWs is still a great challenge. Herein, we report a novel method for fabrication of PSWs via Rochow reaction, which is commonly used to produce organosilane monomers for synthesizing organosilane products in chemical industry. In this reaction, commercial Si wafers (SWs) reacted with gas CH3Cl over patterned various Cu-based catalyst to create regular patterns. PSWs were obtained after removal of Cu compounds followed with facile post treatment. Because of simplicity, low-cost and low-toxicity of this approach, the manufacture of PSWs on an industrial scale is highly possible, which can be realized by integrating the organosilane synthesis process and controlling the reaction conditions. (C) 2015 Elsevier B.V. All rights reserved. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Chemistry ; Materials Science ; Physics |
| 关键词[WOS] | SOLAR-CELLS ; FABRICATION ; NANOWIRES ; LITHOGRAPHY ; LITHIUM ; SYSTEM ; ARRAYS ; MASK |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000366591200024 |
| 源URL | [http://ir.ipe.ac.cn/handle/122111/20180]  |
| 专题 | 过程工程研究所_多相复杂系统国家重点实验室 |
| 作者单位 | 1.Chinese Acad Sci, Inst Proc Engn, State Key Lab Multiphase Complex Syst, Beijing 100190, Peoples R China 2.Univ Chinese Acad Sci, Beijing 100049, Peoples R China 3.ASTAR, Inst Chem Engn & Sci, Jurong Isl 627833, Singapore |
| 推荐引用方式 GB/T 7714 | Ren, Wenfeng,Wang, Yanhong,Zhang, Zailei,et al. Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts[J]. APPLIED SURFACE SCIENCE,2016,360(JAN):192-197. |
| APA | Ren, Wenfeng,Wang, Yanhong,Zhang, Zailei,Tan, Qiangqiang,Zhong, Ziyi,&Su, Fabing.(2016).Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts.APPLIED SURFACE SCIENCE,360(JAN),192-197. |
| MLA | Ren, Wenfeng,et al."Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts".APPLIED SURFACE SCIENCE 360.JAN(2016):192-197. |
入库方式： OAI收割
来源：过程工程研究所
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