Integrated MMI optical couplers and optical switches in Silicon-on-insulator technology
文献类型：会议论文
| 作者 | Yu JH ; Wei HZ ; Zhang XF ; Yan QF ; Xia JS |
| 出版日期 | 2001 |
| 会议名称 | asia-pacific optical and wireless communications conference (apoc 2001) |
| 会议日期 | nov 12-15, 2001 |
| 会议地点 | beijing, peoples r china |
| 关键词 | SOI multimode interference optical coupler optical switch integrated optics MULTIMODE INTERFERENCE COUPLERS POWER SPLITTERS DEVICES DESIGN |
| 页码 | 57-62 |
| 通讯作者 | yu jh chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china. |
| 中文摘要 | integrated multimode interference coupler based on silicon-on-insulator has been become a kind of more and more attractive device in optical systems. thin cladding layers (<1.0mum) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the design and fabrication of multimode interference (mmi) optical couplers and optical switches in soi technology. |
| 英文摘要 | integrated multimode interference coupler based on silicon-on-insulator has been become a kind of more and more attractive device in optical systems. thin cladding layers (<1.0mum) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the design and fabrication of multimode interference (mmi) optical couplers and optical switches in soi technology.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:35z (gmt). no. of bitstreams: 1 2837.pdf: 336056 bytes, checksum: 65e02cc04a94e55701a71aeccc174ab6 (md5) previous issue date: 2001; spie.; china opt & optoelectr manufacturers assoc.; minist informat ind.; china inst commun.; nel ntt electr corp.; credit suisse first boston technol grp.; china telecom.; huawei technologies.; zte corp.; sany optilayer co ltd.; dateng telecom.; photon technol.; o net commun ltd.; china minist sci & technol.; alcatel.; corning.; australia opt soc.; beijing univ posts & telecommun.; korea assoc photon ind dev.; optoelectr ind dev assoc.; optoelectr ind & technol dev assoc.; opt soc india.; opt soc japan.; opt soc korea.; photon ind dev assoc.; photon assoc.; spie asia pacific chapters.; spie tech grp opt networks.; tsinghua univ.; chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china |
| 收录类别 | CPCI-S |
| 会议主办者 | spie.; china opt & optoelectr manufacturers assoc.; minist informat ind.; china inst commun.; nel ntt electr corp.; credit suisse first boston technol grp.; china telecom.; huawei technologies.; zte corp.; sany optilayer co ltd.; dateng telecom.; photon technol.; o net commun ltd.; china minist sci & technol.; alcatel.; corning.; australia opt soc.; beijing univ posts & telecommun.; korea assoc photon ind dev.; optoelectr ind dev assoc.; optoelectr ind & technol dev assoc.; opt soc india.; opt soc japan.; opt soc korea.; photon ind dev assoc.; photon assoc.; spie asia pacific chapters.; spie tech grp opt networks.; tsinghua univ. |
| 会议录 | apoc 2001: asia-pacific optical and wireless communications: optical switching and optical interconnection, 4582
 |
| 会议录出版者 | spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 学科主题 | 半导体器件 |
| 会议录出版地 | 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 语种 | 英语 |
| ISSN号 | 0277-786x |
| ISBN号 | 0-8194-4312-3 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/13651]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Yu JH,Wei HZ,Zhang XF,et al. Integrated MMI optical couplers and optical switches in Silicon-on-insulator technology[C]. 见:asia-pacific optical and wireless communications conference (apoc 2001). beijing, peoples r china. nov 12-15, 2001. |
入库方式： OAI收割
来源：半导体研究所
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