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Integrated multimode interference couplers in silicon-on insulator

文献类型：会议论文

作者Wei HZ ; Yu YZ ; Zhang XF ; Liu ZL ; Ma HZ ; Li GH ; Shi W ; Fang CS
出版日期2000
会议名称conference on optical interconnects for telecommunication and data communications
会议日期nov 08-10, 2000
会议地点beijing, peoples r china
关键词SOI multimode interference optical waveguide device integrated optics POWER SPLITTERS
页码124-127
通讯作者wei hz chinese acad sci inst semicond state key lab integrated optoelect beijing 100083 peoples r china.
中文摘要silicon-on insulator (soi) is an attractive platform for the fabrication of optoelectronic integrated circuit. thin cladding layers (< 1.0m) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (mmi) coupler based on soi technology. performances of the devices are analyzed. the minimum excess loss of the devices is about 1.8db. the devices show uniform power distribution.
英文摘要silicon-on insulator (soi) is an attractive platform for the fabrication of optoelectronic integrated circuit. thin cladding layers (< 1.0m) can be used in soi waveguide due to the large index step between si and sio2, making them compatible with the vlsi technology. here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (mmi) coupler based on soi technology. performances of the devices are analyzed. the minimum excess loss of the devices is about 1.8db. the devices show uniform power distribution.; 于2010-10-29批量导入; made available in dspace on 2010-10-29t06:36:53z (gmt). no. of bitstreams: 1 2892.pdf: 121333 bytes, checksum: 6e4e8babd7aa49dc4fc0f9274a535651 (md5) previous issue date: 2000; china opt & optoelectr manufacturers assoc.; chinese phys soc.; spie.; chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
收录类别CPCI-S
会议主办者china opt & optoelectr manufacturers assoc.; chinese phys soc.; spie.
会议录optical interconnects for telecommunication and data communications, 4225
会议录出版者spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa
学科主题半导体器件
会议录出版地1000 20th st, po box 10, bellingham, wa 98227-0010 usa
语种英语
ISSN号0277-786x
ISBN号0-8194-3896-0
源URL[http://ir.semi.ac.cn/handle/172111/13727]  
专题半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式
GB/T 7714		 Wei HZ,Yu YZ,Zhang XF,et al. Integrated multimode interference couplers in silicon-on insulator[C]. 见:conference on optical interconnects for telecommunication and data communications. beijing, peoples r china. nov 08-10, 2000.

入库方式： OAI收割

来源：半导体研究所

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