A novel FOCAL technique based on BP-ANN
文献类型：期刊论文
| 作者 | Shi WJ ; Wang XZ ; Zhang DQ ; Wang F ; Ma MY(马明英) |
| 刊名 | optik
 |
| 出版日期 | 2006 |
| 卷号 | 117期号:4页码:145 |
| 关键词 | BP-ANN FOCAL technique lithography |
| ISSN号 | 0030-4026 |
| 中文摘要 | in this paper, the feed-forward back-propagation artificial neural network (bp-ann) algorithm is introduced in the traditional focus calibration using alignment procedure (focal) technique, and a novel focal technique based on bp-ann is proposed. the effects of the parameters, such as the number of neurons on the hidden-layer and the number of training epochs, on the measurement accuracy are analyzed in detail. it is proved that the novel focal technique based on bp-ann is more reliable and it is a better choice for measurement of the image quality parameters. (c) 2005 elsevier gmbh. all rights reserved. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000236863100001 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/1968]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Shi WJ,Wang XZ,Zhang DQ,et al. A novel FOCAL technique based on BP-ANN[J]. optik,2006,117(4):145, 150. |
| APA | Shi WJ,Wang XZ,Zhang DQ,Wang F,&马明英.(2006).A novel FOCAL technique based on BP-ANN.optik,117(4),145. |
| MLA | Shi WJ,et al."A novel FOCAL technique based on BP-ANN".optik 117.4(2006):145. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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