Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching
文献类型：期刊论文
| 作者 | Zhang XY (Zhang Xinyu) ; Li H (Li Hui) ; Liu K (Liu Kan) ; Luo J (Luo Jun) ; Xie CS (Xie Changsheng) ; Ji A (Ji An) ; Zhang TX (Zhang Tianxu) |
| 刊名 | journal of micromechanics and microengineering
 |
| 出版日期 | 2010 |
| 卷号 | 20期号:10页码:art. no. 105029 |
| 关键词 | OPTICAL-ELEMENTS DESIGN SILICON ARRAYS LENSES |
| 通讯作者 | zhang, xy, huazhong univ sci & technol, wuhan natl lab optoelect, wuhan 430074, hubei province, peoples r china. 电子邮箱地址: x_yzhang@yahoo.com.cn |
| 合作状况 | 其它 |
| 英文摘要 | a diffractive microlens with a cascade focal plane along the main optical axis of the device is fabricated using a low-cost technique mainly including single mask ultraviolet (uv) photolithography and dual-step koh:h2o etching. based on the evolutionary behavior of converse pyramid-shaped microholes (cpsms) preshaped over a {100}-oriented silicon wafer in koh etchant, the first-step koh etching is performed to transfer initial square micro-openings in a sio2 film grown by plasma enhanced chemical vapor deposition (pecvd) and patterned by single mask uv-photolithography, into cpsms with needed dimension. after completely removing a thinned sio2 mask, basic annular phase steps with a relatively steep sidewall and scheduled height can be shaped in the overlapped etching region between the neighboring silicon concave-arc microstructures evolved from cpsms through the second-step koh etching. morphological measurements demonstrate a desirable surface of the silicon microlens with a roughness in nanometer scale and the feature height of the phase steps formed in the submicrometer range. conventional optics measurements of the plastic diffractive microlens obtained by further hot embossing the fine microrelief phase map over the nickel mask made through a common electrochemical method indicate a highly efficient cascaded focusing performance.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-11-02t00:58:59z no. of bitstreams: 1 diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh：h2o etching.pdf: 930851 bytes, checksum: 0d36d5eeb6c729fa6033104f7503f659 (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-11-02t02:02:04z (gmt) no. of bitstreams: 1 diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh：h2o etching.pdf: 930851 bytes, checksum: 0d36d5eeb6c729fa6033104f7503f659 (md5); made available in dspace on 2010-11-02t02:02:04z (gmt). no. of bitstreams: 1 diffractive microlens with a cascade focal plane fabricated by single mask uv-photolithography and common koh：h2o etching.pdf: 930851 bytes, checksum: 0d36d5eeb6c729fa6033104f7503f659 (md5) previous issue date: 2010; the authors are grateful to the analytical and testing center of huazhong university of science&technology for valuable help. this research was supported by the key fund of wuhan national laboratory for optoelectronics (no 0101187006) and the national natural science foundation of china (no 60777003 and no 60736010).; 其它 |
| 学科主题 | 微电子学 |
| 收录类别 | 其他 |
| 资助信息 | the authors are grateful to the analytical and testing center of huazhong university of science&technology for valuable help. this research was supported by the key fund of wuhan national laboratory for optoelectronics (no 0101187006) and the national natural science foundation of china (no 60777003 and no 60736010). |
| 语种 | 英语 |
| 公开日期 | 2010-11-02 ; 2011-04-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/13905]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Zhang XY ,Li H ,Liu K ,et al. Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching[J]. journal of micromechanics and microengineering,2010,20(10):art. no. 105029. |
| APA | Zhang XY .,Li H .,Liu K .,Luo J .,Xie CS .,...&Zhang TX .(2010).Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching.journal of micromechanics and microengineering,20(10),art. no. 105029. |
| MLA | Zhang XY ,et al."Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching".journal of micromechanics and microengineering 20.10(2010):art. no. 105029. |
入库方式： OAI收割
来源：半导体研究所
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