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Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis
文献类型：期刊论文
| 作者 | Cao LX (Cao Li-Xin) ; Zhang FX (Zhang Feng-Xin) ; Zhu YF (Zhu Yin-Fang) ; Yang JL (Yang Jin-Ling) |
| 刊名 | chinese physics letters
 |
| 出版日期 | 2010 |
| 卷号 | 27期号:10页码:art. no. 108501 |
| 关键词 | SENSITIVITY PERFORMANCE CANTILEVERS |
| 通讯作者 | cao, lx, chinese acad sci, inst phys, natl lab superconduct, beijing 100190, peoples r china. 电子邮箱地址: lxcao@aphy.iphy.ac.cn |
| 合作状况 | 国内 |
| 英文摘要 | we present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultra-high sensitivity. the infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser doppler vibrometer. ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. the photon detection system was set up. the response of the microcantilever to the photon illumination is theoretically estimated, and a nanowatt resolution for the infrared photon detection is expected at room temperature with this method.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-11-02t01:20:51z no. of bitstreams: 1 ultrasensitive detection of infrared photon using microcantilever：theoretical analysis.pdf: 495323 bytes, checksum: 74aca2b40ea74c7a3ccd3b744d02279c (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-11-02t02:02:35z (gmt) no. of bitstreams: 1 ultrasensitive detection of infrared photon using microcantilever：theoretical analysis.pdf: 495323 bytes, checksum: 74aca2b40ea74c7a3ccd3b744d02279c (md5); made available in dspace on 2010-11-02t02:02:35z (gmt). no. of bitstreams: 1 ultrasensitive detection of infrared photon using microcantilever：theoretical analysis.pdf: 495323 bytes, checksum: 74aca2b40ea74c7a3ccd3b744d02279c (md5) previous issue date: 2010; supported by the national basic research program of china under grant no 2006cb921107.; 国内 |
| 学科主题 | 微电子学 |
| 收录类别 | SCI |
| 资助信息 | supported by the national basic research program of china under grant no 2006cb921107. |
| 语种 | 英语 |
| 公开日期 | 2010-11-02 ; 2011-04-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/13909]  |
| 专题 | 半导体研究所_半导体集成技术工程研究中心 |
| 推荐引用方式 GB/T 7714 | Cao LX ,Zhang FX ,Zhu YF ,et al. Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis[J]. chinese physics letters,2010,27(10):art. no. 108501. |
| APA | Cao LX ,Zhang FX ,Zhu YF ,&Yang JL .(2010).Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis.chinese physics letters,27(10),art. no. 108501. |
| MLA | Cao LX ,et al."Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis".chinese physics letters 27.10(2010):art. no. 108501. |
入库方式： OAI收割
来源：半导体研究所
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