A novel method to determine the FOCAL energy range
文献类型：期刊论文
| 作者 | Dongqing Zhang ; Wang XC(王向朝) ; Weijie Shi |
| 刊名 | chin. opt. lett.
 |
| 出版日期 | 2005 |
| 卷号 | 3期号:10页码:589 |
| ISSN号 | 1671-7694 |
| 关键词 | diffraction and gratings focal-plane-array image processors instrumentation measurement and metrology optical devices |
| 中文摘要 | determination of the energy range is an important precondition of focus calibration using alignment procedure (focal) test. a new method to determine the energy range of focal off-lined is presented in this paper. independent of the lithographic tool, the method is time-saving and effective. the influences of some process factors, e.g. resist thickness, post exposure bake (peb) temperature, peb time and development time, on the energy range of focal are analyzed. |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2066]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Dongqing Zhang,Wang XC,Weijie Shi. A novel method to determine the FOCAL energy range[J]. chin. opt. lett.,2005,3(10):589, 592. |
| APA | Dongqing Zhang,王向朝,&Weijie Shi.(2005).A novel method to determine the FOCAL energy range.chin. opt. lett.,3(10),589. |
| MLA | Dongqing Zhang,et al."A novel method to determine the FOCAL energy range".chin. opt. lett. 3.10(2005):589. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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