Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings
文献类型：期刊论文
| 作者 | Yuan Qiongyan ; Wang XC(王向朝) ; Qiu Zicheng ; Wang Fan ; Ma MY(马明英) ; He Le |
| 刊名 | opt. express
 |
| 出版日期 | 2007 |
| 卷号 | 15期号:24页码:15878 |
| 关键词 | Computer simulation Diffraction gratings Image analysis Phase shift |
| ISSN号 | 1094-4087 |
| 中文摘要 | in this paper, we propose a novel method for measuring the coma aberrations of lithographic projection optics based on relative image displacements at multiple illumination settings. the measurement accuracy of coma can be improved because the phase-shifting gratings are more sensitive to the aberrations than the binary gratings used in the tamis technique, and the impact of distortion on displacements of aerial image can be eliminated when the relative image displacements are measured. the prolith simulation results show that, the measurement accuracy of coma increases by more than 25% under conventional illumination, and the measurement accuracy of primary coma increases by more than 20% under annular illumination, compared with the tamis technique. (c) 2007 optical society of america. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000251223900025 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2158]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Yuan Qiongyan,Wang XC,Qiu Zicheng,et al. Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings[J]. opt. express,2007,15(24):15878, 15885. |
| APA | Yuan Qiongyan,王向朝,Qiu Zicheng,Wang Fan,马明英,&He Le.(2007).Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings.opt. express,15(24),15878. |
| MLA | Yuan Qiongyan,et al."Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings".opt. express 15.24(2007):15878. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。