Finite element analysis on a circular wedge prism with 400 mm diameter
文献类型：期刊论文
| 作者 | Li AH(李安虎) ; Liu LR(刘立人) ; Sun JF(孙建锋) ; Zhu Yongjian ; Shen Qiande |
| 刊名 | optik
 |
| 出版日期 | 2007 |
| 卷号 | 118期号:12页码:589 |
| 关键词 | optical device thermal-structure coupling p-v RMS |
| ISSN号 | 0030-4026 |
| 中文摘要 | the paper comprehensively analyzes the distortions of a circular wedge prism with 400 mm diameter in a scanner by method of optical-mechanical-thermal integrating analysis. the structure and intensity of the prism assembly is verified and checked, and the surface deformations of the prism under gravity load, as well as the thermo-elastic distortions of the prism, are analyzed in detail and evaluated, which is finally contrasted with the measured values of zygo mark interferometer. the results show: the maximal distortion of the prism assembly is 10 nm magnitude and the maximal stress is 0.441 mpa, which has much tolerance to the precision requirement of structure and the admissible stress of material; the influence of heat effect on the surface deformations of prism is proved to be far greater than the influence of gravity load, so some strict temperature-controlled measures are to be considered when the scanner is used. (c) 2006 elsevier gmbh. all rights reserved. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000251514800008 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2192]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Li AH,Liu LR,Sun JF,et al. Finite element analysis on a circular wedge prism with 400 mm diameter[J]. optik,2007,118(12):589, 593. |
| APA | 李安虎,刘立人,孙建锋,Zhu Yongjian,&Shen Qiande.(2007).Finite element analysis on a circular wedge prism with 400 mm diameter.optik,118(12),589. |
| MLA | 李安虎,et al."Finite element analysis on a circular wedge prism with 400 mm diameter".optik 118.12(2007):589. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。