Microstructures of Ge/Si superlattices growth at low temperature
文献类型：期刊论文
| 作者 | Wu, XS; Tan, WS; Jiang, SS; Wu, ZH ; Ding, YF; Cheng, HH; Wu ZH(吴忠华); Ding YF(丁永凡)
|
| 刊名 | HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
 |
| 出版日期 | 2003 |
| 卷号 | 27期号:8页码:739-743 |
| 关键词 | synchrotron X-ray reflectivity and transverse scattering Si/Ge superlattices MBE growth at low temperature |
| 通讯作者 | Nanjing Univ, Solid State Microstruct Lab, Nanjing 210093, Peoples R China ; Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China ; Taiwan Natl Univ, Ctr Condensed Matter Sci, Taipei, Taiwan |
| 英文摘要 | Si/Ge superlattices were grown at low temperature with modified Stranski-Krastanov (SK) MBE method. X-ray specular, off-specular reflectivity, and X-ray transverse scattering measurements were done to characterize the structure of the Ge/Si superlattice. The fitted roughness and the thickness of the Ge-layer indicate that Ge may diffuse into Si-layer and form the inverted trapezium or nano-scaled hut at the Si/Ge interface. The inverted trapezium extends to form islands, which can be estimated from the volume of the Ge-Si alloy in the structure. These islands can be averaged as a Ge-Si alloy sub-layer, the averaged thickness was fitted from the pure X-ray specular reflectivity. The composition of Ge in the SiGe dots was estimated as 15%-25% by X-ray specular reflectivity and by the thickness of Ge sub-layer. These results were confirmed by TEM observation. |
| 学科主题 | Physics |
| 类目[WOS] | Physics, Nuclear ; Physics, Particles & Fields |
| 研究领域[WOS] | Physics |
| 原文出处 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000184730800018 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/238399]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Wu, XS,Tan, WS,Jiang, SS,et al. Microstructures of Ge/Si superlattices growth at low temperature[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2003,27(8):739-743. |
| APA | Wu, XS.,Tan, WS.,Jiang, SS.,Wu, ZH.,Ding, YF.,...&丁永凡.(2003).Microstructures of Ge/Si superlattices growth at low temperature.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,27(8),739-743. |
| MLA | Wu, XS,et al."Microstructures of Ge/Si superlattices growth at low temperature".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 27.8(2003):739-743. |
入库方式： OAI收割
来源：高能物理研究所
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