Structure fabrication of PI film for GEM detector
文献类型：期刊论文
| 作者 | Yi FT(伊福廷) ; Luo L(罗亮); Zhang JF(张菊芳); Chen YB(陈元柏); Xie YG(谢一冈); Xie W(谢万); Yi, FT; Luo, L; Zhang, JF; Chen, YB
|
| 刊名 | HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION
 |
| 出版日期 | 2007 |
| 卷号 | 31期号:10页码:929-932 |
| 关键词 | GEM film gas electron multiplier (GEM) particle detector X-ray detector |
| 通讯作者 | Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China ; Grad Univ Chinese Acad Sci, Beijing 100049, Peoples R China |
| 英文摘要 | GEM, which has rapidly been developed in recent years as a new type of gas detector, has advantages of high position resolution and counting rate with a wide potential application in particle physics and X-ray imaging and etc. One of the key techniques of GEM's development is the structure fabrication of the PI film for the detector, which is difficult to be done by the lithography process. In this paper we present the structure fabrication process of GEM's PI film, and the result of our work about it. We chose wet-etching and dry-etching to make the. structure holes of PI film, and find that wet-etching is better way to get perfect holes of GEM's PI film for future application with acceptable price. The successful fabrication of GEM's film structures is helpful to develop the domestic research of GEM detector. The performance of the GEM detector with such PI film still need more detail study. |
| 学科主题 | Physics |
| 类目[WOS] | Physics, Nuclear ; Physics, Particles & Fields |
| 研究领域[WOS] | Physics |
| 原文出处 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000249975800006 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/238760]  |
| 专题 | 高能物理研究所_实验物理中心 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Yi FT,Luo L,Zhang JF,et al. Structure fabrication of PI film for GEM detector[J]. HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,2007,31(10):929-932. |
| APA | 伊福廷.,罗亮.,张菊芳.,陈元柏.,谢一冈.,...&Xie, W.(2007).Structure fabrication of PI film for GEM detector.HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION,31(10),929-932. |
| MLA | 伊福廷,et al."Structure fabrication of PI film for GEM detector".HIGH ENERGY PHYSICS AND NUCLEAR PHYSICS-CHINESE EDITION 31.10(2007):929-932. |
入库方式： OAI收割
来源：高能物理研究所
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